采用AIN基板的直接芯片安装GaAs电源模块

M. Maeda, H. Takehara, M. Nishijima, H. Fujimoto, Y. Ota, O. Ishikawa
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引用次数: 1

摘要

将GaAs功率mesfet直接安装在氮化铝(AIN)衬底上,开发了一种用于模拟蜂窝电话的新型功率放大器模块。该模块的体积为0.2cc,仅为传统模块的1/4,在900MHz频段左右的3.5V低工作电压下,输出功率(Pout)为31dBm,功率附加效率(PAE)为58%。此外,为了提高PAMs的良率,还引入了一种新的微波探针卡用于fet的片上射频功率测量。使用该探针卡,可获得30.9dBm的最大输出功率,晶片上与封装fet之间的增益偏差仅为1.4dB。这种新的PAM概念和开发的晶圆上测量技术必须保证先进的高性能PAM。
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Direct Chip Mounting GaAs Power Module using an AIN Substrate
A new power amplifier module (PAM) in which GaAs power MESFETs are mounted directly on an aluminum nitride (AIN) substrate has been developed for analog cellular phones. This module occupies a volume of 0.2cc, only 1/4 as large as that of conventional one, and can deliver an output power (Pout) of 31dBm with a power-added efficiency (PAE) of 58% at a low operating voltage of 3.5V around 900MHz band. Furthermore, a new microwave probe card has been introduced into on-wafer RF power measurement of the FETs in order to improve the yield of the PAMs. Using this probe card, the maximum output power of 30.9dBm has been obtained, and gain deviation between on-wafer and packaged FETs is only 1.4dB. This new concept PAM and the developed on-wafer measurement technique must promise advanced high-performance PAM.
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