C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser
{"title":"磁力计基于一个石英MEMS谐振器与两个detf和一堆磁性材料","authors":"C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser","doi":"10.1109/INERTIAL53425.2022.9787760","DOIUrl":null,"url":null,"abstract":"This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials\",\"authors\":\"C. Mauc, T. Perrier, R. Lévy, J. Moulin, P. Kayser\",\"doi\":\"10.1109/INERTIAL53425.2022.9787760\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.\",\"PeriodicalId\":435781,\"journal\":{\"name\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"59 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL53425.2022.9787760\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL53425.2022.9787760","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials
This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.
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