针尖速度对AFM划痕的影响

2016 International Conference on Information and Digital Technologies (IDT) Pub Date : 2016-07-05 DOI:10.1109/DT.2016.7557167

Josef Kudelka, Tomás Martínek, M. Navrátil, V. Kresálek

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引用次数: 3

摘要

在本研究中，我们研究了针尖速度对AFM划痕的影响。在不同的刻划参数下，在聚碳酸酯基板上刻划出三种测试图案。随后用相同的原子力显微镜对制备的结构进行表征。结果表明，叶片的深度和宽度对叶尖速度的依赖性较弱。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The effect of tip speed in AFM scratching

In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed.

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2016 International Conference on Information and Digital Technologies (IDT)

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