ZrO2厚膜和薄膜的结构、形态、光学和微观结构研究

S. Deshmukh, S. Patil, R. H. Bari
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引用次数: 0

摘要

文章历史:收到2019年9月07日接受2019年9月27日在线2019年10月14日在目前的工作中,我们通过不同的技术合成了ZrO2厚膜和薄膜。采用XRD、FESEM、FETEM和紫外-可见光谱等分析技术对制备的ZrO2厚膜和薄膜进行了表征。从这些研究中可以观察到,合成的薄膜的晶粒尺寸分别在25 nm和7 nm之间,其中厚膜和薄膜的晶粒尺寸分别在25 nm和7 nm之间。对两种薄膜的结晶性、晶粒尺寸、带隙、活化能等进行了讨论、解释和报道。本研究对各方面进行了比较研究。
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Studies on ZrO2 Thick and Thin Films: Structural, Morphological, Optical and Microstructure Behaviour
Article history: Received 07 September 2019 Accepted 27 September 2019 Available online 14 October 2019 In present work we have synthesized ZrO2 thick and thin film by different techniques. Prepared ZrO2 thick and thin films were investigated by different analytical techniques such as XRD, FESEM, FETEM, and UV-Visible spectral studies. From these studies, it was observed that the size of the synthesized films is found within 25 nm and 7 nm crystallite sizes for thick and thin film respectively. Crystanality, grain size, band gap, activation energy and other for both films were discussed, interpreted and reported. Comparative studies in all aspects were presented in this work.
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