用原位电镜表征高温无铅焊料互连的热稳定性

Zhaoxia Zhou, Li Liu, Changqing Liu
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引用次数: 0

摘要

采用透射电子显微镜(TEM)原位加热实验对Cu/Ni-W-P中间层/ZnAl焊料互连的热稳定性进行了表征。结果表明,TEM能够在加热过程中检测到活性金属间化合物(IMCs)的生长。此外,NiW-P夹层与ZnAl钎料界面处位错的逐渐演变也证明了应力的积累。然而,由于电子显微镜所需的样品尺寸为μm至nm,样品制备和数据解释仍然是一个挑战。
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Thermal stability of high temperature Pb-free solder interconnect characterised by in-situ electron microscopy
The present investigation aimed to use in-situ heating experiment in a transmission electron microscope (TEM) to live characterize the thermal stability of a Cu/Ni-W-P interlayer/ZnAl solder interconnect. It demonstrated the TEM was able to detect live intermetallic compounds (IMCs) growth during heating. In addition, stress building up was evidenced by the progressive evolving of the dislocations at the interface between NiW-P interlayer and the ZnAl Solder. However, due to the μm to nm scale of specimens’ dimensions required for electron microscopy, the sample preparation and data interpretation remains a challenge.
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