利用纳米压痕、3ω法和声子输运分析研究了非晶硅薄膜的超低导热性

IF 2.3 4区 物理与天体物理 Q3 PHYSICS, APPLIED Applied Physics Express Pub Date : 2023-11-10 DOI:10.35848/1882-0786/ad0ba3
Daiki Tanisawa, Tetsuya Takizawa, Asato Yamaguchi, Hiroshi Murotani, Masayuki Takashiri
{"title":"利用纳米压痕、3ω法和声子输运分析研究了非晶硅薄膜的超低导热性","authors":"Daiki Tanisawa, Tetsuya Takizawa, Asato Yamaguchi, Hiroshi Murotani, Masayuki Takashiri","doi":"10.35848/1882-0786/ad0ba3","DOIUrl":null,"url":null,"abstract":"Abstract The origin of the ultralow thermal conductivity in amorphous Si thin films was investigated by comparing their phonon transport properties with those of single-crystal Si. The group velocity and thermal conductivity were measured at 300 K using nanoindentation and the 3ω method, respectively. The phonon mean free path (MFP) and phonon frequency were determined using the measured properties and models. The scattering in the disordered structure of amorphous Si thin films caused a significant decrease in the phonon MFP with increase in the phonon frequency, leading to ultralow thermal conductivity. However, the group velocity was unaffected by the disordered structure.","PeriodicalId":8093,"journal":{"name":"Applied Physics Express","volume":"24 9","pages":"0"},"PeriodicalIF":2.3000,"publicationDate":"2023-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Origin of ultralow thermal conductivity in amorphous Si thin films investigated using nanoindentation, 3ω method, and phonon transport analysis\",\"authors\":\"Daiki Tanisawa, Tetsuya Takizawa, Asato Yamaguchi, Hiroshi Murotani, Masayuki Takashiri\",\"doi\":\"10.35848/1882-0786/ad0ba3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract The origin of the ultralow thermal conductivity in amorphous Si thin films was investigated by comparing their phonon transport properties with those of single-crystal Si. The group velocity and thermal conductivity were measured at 300 K using nanoindentation and the 3ω method, respectively. The phonon mean free path (MFP) and phonon frequency were determined using the measured properties and models. The scattering in the disordered structure of amorphous Si thin films caused a significant decrease in the phonon MFP with increase in the phonon frequency, leading to ultralow thermal conductivity. However, the group velocity was unaffected by the disordered structure.\",\"PeriodicalId\":8093,\"journal\":{\"name\":\"Applied Physics Express\",\"volume\":\"24 9\",\"pages\":\"0\"},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2023-11-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Physics Express\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.35848/1882-0786/ad0ba3\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Physics Express","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35848/1882-0786/ad0ba3","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0

摘要

摘要通过比较非晶硅薄膜与单晶硅薄膜的声子输运特性,探讨了非晶硅薄膜超低导热性的原因。采用纳米压痕法和3ω法分别测量了300 K下的群速度和导热系数。利用测量的性质和模型确定了声子平均自由程和声子频率。非晶硅薄膜无序结构中的散射导致声子MFP随声子频率的增加而显著降低,导致其导热系数极低。然而,群速度不受无序结构的影响。
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Origin of ultralow thermal conductivity in amorphous Si thin films investigated using nanoindentation, 3ω method, and phonon transport analysis
Abstract The origin of the ultralow thermal conductivity in amorphous Si thin films was investigated by comparing their phonon transport properties with those of single-crystal Si. The group velocity and thermal conductivity were measured at 300 K using nanoindentation and the 3ω method, respectively. The phonon mean free path (MFP) and phonon frequency were determined using the measured properties and models. The scattering in the disordered structure of amorphous Si thin films caused a significant decrease in the phonon MFP with increase in the phonon frequency, leading to ultralow thermal conductivity. However, the group velocity was unaffected by the disordered structure.
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来源期刊
Applied Physics Express
Applied Physics Express 物理-物理:应用
CiteScore
4.80
自引率
8.70%
发文量
310
审稿时长
1.2 months
期刊介绍: Applied Physics Express (APEX) is a letters journal devoted solely to rapid dissemination of up-to-date and concise reports on new findings in applied physics. The motto of APEX is high scientific quality and prompt publication. APEX is a sister journal of the Japanese Journal of Applied Physics (JJAP) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
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