Investigation of the parameters of MEMS deflectors to determine the magnetic permeability of the dipole material

Micro-electromechanical (MEMS) deflectors with electromagnetic control and an experimental stand for measuring their functional parameters are considered. The electromagnetic control method makes it possible to obtain a high positioning accuracy of the reflected beam along one spatial coordinate, and also provides increased speed with the time of deviation of the light flux to a predetermined position of 5–10 μs. Graphs of experimental and theoretical dependences of the angle of deviation of the light flux on the induction of the control magnetic field of MEMS deflectors are presented. Using the method of successive approximations, the value of the magnetic permeability of the dipole material µ = 120 was selected, and the maximum value of the angular deviation of the light flux along one spatial coordinate was determined, which is 13.50. The MEMS presented in this paper can be used, first of all, as high-speed deflectors and optical flow scanners with a beam diameter of up to 2.5 mm.