氢氟酸(HF)浓度对日光光化学蚀刻(SLPCE)多孔硅层形貌影响的研究

IF 1 Q3 PHYSICS, MULTIDISCIPLINARY East European Journal of Physics Pub Date : 2023-09-04 DOI:10.26565/2312-4334-2023-3-35
Rosure Borhanalden Abdulrahman, Hassan A. Kadhem, Abdul Hakim Sh. Mohammed, Issa Z. Hassan
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引用次数: 0

摘要

硅纳米晶体具有广泛的潜在应用,从提高太阳能电池和光电子器件的效率到生物医学成像和药物输送,废水处理和抗菌活性。在本研究中,采用光化学蚀刻技术在供体硅片上制备多孔硅层,取向为111,电阻率为1 - 10欧姆·厘米。该过程包括使用焦距为30厘米、直径为90毫米的长焦镜头将太阳光聚焦到样品上,以提供足够的能量来完成化学蚀刻。采用60分钟恒定蚀刻时间和不同浓度的氢氟酸(25% ~ 40%),可获得不同性质的层。利用原子力显微镜(AFM)对所得表面进行了研究,揭示了不同制备条件下不同形状、大小和厚度的不同纳米结构和颗粒的形成。当氟化酸浓度为40%时,颗粒的平均粒径为90.43nm,当氟化酸浓度为25%时,颗粒的平均粒径为48.7nm。
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Study the Effect of Hydrofluoric (HF) Concentration on the Topography of the Porous Silicon Layer Prepared by Sunlight Photochemical Etching (SLPCE)
Silicon nanocrystals have a vast range of potential applications, from improving the efficiency of solar cells and optoelectronic devices to biomedical imaging and drug delivery, wastewater treatment, and antibacterial activities. In this study a photochemical etching technique was used to create layers of porous silicon on a donor silicon wafer with orientation (111) and resistivity equal to 1‑10 ohm·cm. The process involved focusing sunlight onto the samples using a telephoto lens with a suitable focal length of 30cm and a diameter of 90 mm, which provided sufficient energy to complete the chemical etching. By using a constant etching time of 60 minutes and different concentrations of hydrofluoric acid (ranging from 25% to 40%), layers with varying properties were obtained. The resulting surfaces were studied using the atomic force microscope (AFM), revealing the formation of different nanostructures and particles with varying shapes, sizes, and thicknesses depending on the preparation conditions. The average size of the particles was found to be 90.43nm at a concentration of 40% acid, while decreasing to 48.7nm at a concentration of 25% HF acid.
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来源期刊
East European Journal of Physics
East European Journal of Physics PHYSICS, MULTIDISCIPLINARY-
CiteScore
1.10
自引率
25.00%
发文量
58
审稿时长
8 weeks
期刊最新文献
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