利用一维离子束系统对 500 毫米长的 X 射线反射镜进行二维精确定位

IF 4.2 2区工程技术 Q2 ENGINEERING, MANUFACTURING Advances in Manufacturing Pub Date : 2023-09-25 DOI:10.1007/s40436-023-00459-9

Qiu-Shi Huang, Han-Dan Huang, Qiao-Yu Wu, Jun Yu, Zhong Zhang, Zhan-Shan Wang

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引用次数: 0

摘要

本研究开发了一种新方法，利用一维（1D）离子束绘图系统实现掠入射 X 射线反射镜的二维（2D）图形校正。专门设计的孔掩模可产生不同宽度的移除功能，并在大范围内扩展绘图能力。因此，可以制造长镜。利用这种方法，484 mm ×16 mm 中心区域的表面高度均方根误差从 11.49 nm 减小到 2.01 nm，一维经向均方根误差达到 1.0 nm。该方法精度高、成本低，适用于生产长 X 射线反射镜。

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Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.

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来源期刊

Advances in Manufacturing Materials Science-Polymers and Plastics

CiteScore

9.10

自引率

3.80%

发文量

274

期刊介绍： As an innovative, fundamental and scientific journal, Advances in Manufacturing aims to describe the latest regional and global research results and forefront developments in advanced manufacturing field. As such, it serves as an international platform for academic exchange between experts, scholars and researchers in this field. All articles in Advances in Manufacturing are peer reviewed. Respected scholars from the fields of advanced manufacturing fields will be invited to write some comments. We also encourage and give priority to research papers that have made major breakthroughs or innovations in the fundamental theory. The targeted fields include: manufacturing automation, mechatronics and robotics, precision manufacturing and control, micro-nano-manufacturing, green manufacturing, design in manufacturing, metallic and nonmetallic materials in manufacturing, metallurgical process, etc. The forms of articles include (but not limited to): academic articles, research reports, and general reviews.