Super-resolution three-dimensional structured illumination profilometry for in situ measurement of femtosecond laser ablation morphology

Femtosecond laser ablation has found wide-ranging applications in the surface structuring of nanoelectronics and nanophotonics devices. Traditionally, the inspection of the fabricated three-dimensional (3D) morphology was performed using a scanning electron microscope or atomic force microscopy in an ex situ manner after processing was complete. To quickly monitor and efficiently optimize the quality of surface fabrication, we developed an in situ method to accurately reconstruct the 3D morphology of surface micro-structures. This method is based on a triangulation optical system that utilizes structured illumination. The approach offers a super-resolution capacity, making it a powerful and non-invasive tool for quick in situ monitoring of surface ablation structures.