磁控溅射中放电电流调制提高TC4合金基体上CrN涂层的附着力

IF 2.4 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Surface Engineering Pub Date : 2023-06-03 DOI:10.1080/02670844.2023.2257359
Shuai Xu, Zhuo Zhao, Yanwen Zhou, Kaice Zhang
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引用次数: 0

摘要

摘要本文报道了通过改变磁控溅射热丝的放电电流,在TC4衬底上形成变梯度模量的多层CrN涂层。结果表明:与单层CrN/TC4相比,多层CrN/TC4具有更高的临界破坏载荷(63.4 N > 29.7 N)、更低的最大拉应力(103.8 GPa < 134.3 GPa)和更高的塑性与弹性变形功比(Wp/We, 2.11 > 1.58);这说明通过增加松散的吸能亚层,可以提高失效前涂层/基体的吸能能力,从而提高涂层/基体的附着力。值得注意的是,多层和单层涂层的磨损速率都在10−16 m3/(N·m)量级,表现出优异的耐磨性。结构工程使多层CrN涂层能够应用于低模量和高强度合金基底,如TC4。通过改变灯丝放电电流获得致密多孔多层涂层。多层CrN与TC4的模量差减小。最大拉应力出现在Cr和CrN层的界面处。多层CrN/TC4具有较高的Wp/We和吸收变形的能力。多层CrN/TC4具有高附着力和优异的耐磨性。关键词:结构工程、磁控溅射、放电电流、多层涂层、合金衬底、模拟黏附模量公开声明作者未报告潜在的利益冲突。基金资助:国家自然科学基金项目[批准号:51972155和52271056];辽宁省教育行政基金[批准号:LJKZ0278和LJKZ0306]。
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Improving the adhesion of CrN coatings on TC4 alloy substrates by discharge current modulation in magnetron sputtering
ABSTRACTThe study reports the formation of multilayer coatings of CrN with variable gradient modulus on TC4 substrate by varying the discharge current of the hot filament in magnetron sputtering. Results show that multilayer CrN/TC4 has a higher critical failure load (63.4 N > 29.7 N), lower maximum tensile stress (103.8 GPa < 134.3 GPa), and a higher ratio of plastic to elastic deformation work (Wp/We, 2.11 > 1.58) than a single layer CrN/TC4. This indicates that the energy absorption ability of the coating/substrate before failure can be improved by increasing the loose energy-absorbing sublayer, thus improving the coating/substrate adhesion. Notably, the wear rate of both multilayer and single-layer coatings is in the order of 10−16 m3/(N·m), demonstrating their excellent wear resistance. Structural engineering enables the application of multilayer CrN coatings on low-modulus and high-strength alloy substrates, such as TC4.HIGHLIGHTS A dense-porous multilayer coating obtained by varying the filament discharge currents.The modulus difference between the multilayer CrN and TC4 reduced.The maximum tensile stress appeared at the interface of the Cr and CrN layers.The multilayer CrN/TC4 with high Wp/We and absorption ability of deformation work.The multilayer CrN/TC4 was with high adhesion and excellent wear resistance.KEYWORDS: Structure engineeringmagnetron sputteringdischarge currentsmultilayer coatingalloy substratesimulationadhesionmodulus Disclosure statementNo potential conflict of interest was reported by the author(s).Additional informationFundingThis work was supported by National Natural Science Foundation of China [grant number 51972155 and 52271056]; Foundation of Liaoning Educational Administration [grant number LJKZ0278 and LJKZ0306].
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来源期刊
Surface Engineering
Surface Engineering 工程技术-材料科学:膜
CiteScore
5.60
自引率
14.30%
发文量
51
审稿时长
2.3 months
期刊介绍: Surface Engineering provides a forum for the publication of refereed material on both the theory and practice of this important enabling technology, embracing science, technology and engineering. Coverage includes design, surface modification technologies and process control, and the characterisation and properties of the final system or component, including quality control and non-destructive examination.
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