{"title":"用于宽带光敏应用的In2O3修饰TiO2","authors":"Sharmila B, Priyanka Dwivedi","doi":"10.1088/1361-6641/ad0175","DOIUrl":null,"url":null,"abstract":"Abstract This paper presents the fabrication and broadband photosensing of bare TiO 2 and In 2 O 3 decorated TiO 2 based photodetectors. The photosensing properties of the In 2 O 3 decorated TiO 2 were compared with the bare TiO 2 . The proposed photosensing devices are wafer scalable. The devices were tested in the broad spectral range from ultraviolet to near-infrared wavelengths. The In 2 O 3 decorated TiO 2 heterojunction-based photodetector showed improved photocurrent with a high photo to dark current ratio in the order of 4 × 10 3 , which is 10 3 times higher than the TiO 2 photodetector at 450 nm. In addition, this heterojunction based photodetector shows the responsivity and detectivity of 1415 mA W –1 and 4.97 × 10 12 Jones respectively. Moreover, In 2 O 3 decorated TiO 2 heterojunction shows highly repeatable results with a rise/fall time of 1.42/0.09 s. The fabricated photodetectors could have more potential in the field of broadband optical sensing.","PeriodicalId":21585,"journal":{"name":"Semiconductor Science and Technology","volume":"169 1","pages":"0"},"PeriodicalIF":1.9000,"publicationDate":"2023-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"In2O3 decorated TiO2 for broadband photosensing applications\",\"authors\":\"Sharmila B, Priyanka Dwivedi\",\"doi\":\"10.1088/1361-6641/ad0175\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract This paper presents the fabrication and broadband photosensing of bare TiO 2 and In 2 O 3 decorated TiO 2 based photodetectors. The photosensing properties of the In 2 O 3 decorated TiO 2 were compared with the bare TiO 2 . The proposed photosensing devices are wafer scalable. The devices were tested in the broad spectral range from ultraviolet to near-infrared wavelengths. The In 2 O 3 decorated TiO 2 heterojunction-based photodetector showed improved photocurrent with a high photo to dark current ratio in the order of 4 × 10 3 , which is 10 3 times higher than the TiO 2 photodetector at 450 nm. In addition, this heterojunction based photodetector shows the responsivity and detectivity of 1415 mA W –1 and 4.97 × 10 12 Jones respectively. Moreover, In 2 O 3 decorated TiO 2 heterojunction shows highly repeatable results with a rise/fall time of 1.42/0.09 s. The fabricated photodetectors could have more potential in the field of broadband optical sensing.\",\"PeriodicalId\":21585,\"journal\":{\"name\":\"Semiconductor Science and Technology\",\"volume\":\"169 1\",\"pages\":\"0\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2023-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6641/ad0175\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6641/ad0175","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
摘要本文介绍了裸二氧化钛和二氧化钛修饰二氧化钛光电探测器的制备和宽带光敏技术。比较了In 2o3修饰tio2与裸tio2的光敏性能。提出的光敏器件是晶圆可扩展的。这些装置在从紫外线到近红外波长的宽光谱范围内进行了测试。在450 nm处,铟氧修饰tio2异质结光电探测器的光电流得到改善,光暗比达到4 × 10 3,是tio2光电探测器的10 3倍。此外,该异质结光电探测器的响应率和探测率分别为1415 mA W -1和4.97 × 10 12 Jones。此外,In 2o3修饰的tio2异质结具有高度可重复性,上升/下降时间为1.42/0.09 s。所制备的光电探测器在宽带光传感领域具有较大的应用潜力。
In2O3 decorated TiO2 for broadband photosensing applications
Abstract This paper presents the fabrication and broadband photosensing of bare TiO 2 and In 2 O 3 decorated TiO 2 based photodetectors. The photosensing properties of the In 2 O 3 decorated TiO 2 were compared with the bare TiO 2 . The proposed photosensing devices are wafer scalable. The devices were tested in the broad spectral range from ultraviolet to near-infrared wavelengths. The In 2 O 3 decorated TiO 2 heterojunction-based photodetector showed improved photocurrent with a high photo to dark current ratio in the order of 4 × 10 3 , which is 10 3 times higher than the TiO 2 photodetector at 450 nm. In addition, this heterojunction based photodetector shows the responsivity and detectivity of 1415 mA W –1 and 4.97 × 10 12 Jones respectively. Moreover, In 2 O 3 decorated TiO 2 heterojunction shows highly repeatable results with a rise/fall time of 1.42/0.09 s. The fabricated photodetectors could have more potential in the field of broadband optical sensing.
期刊介绍:
Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic.
The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including:
fundamental properties
materials and nanostructures
devices and applications
fabrication and processing
new analytical techniques
simulation
emerging fields:
materials and devices for quantum technologies
hybrid structures and devices
2D and topological materials
metamaterials
semiconductors for energy
flexible electronics.