利用激光微机械加工技术在 AA 6063 上制造突起多形微特征阵列的研究

Saravanan Murugayan, Simson D, Samarjeet Chanda, K. S
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摘要

器件部件的小型化是微特征制造的驱动力。本研究尝试用激光微加工的方法在AA 6063上制作凸形多面体微特征阵列。为了制造突出的微特征,以轨迹深度、宽度和表面粗糙度为输出参数,对激光功率、激光束扫描速度和频率等工艺参数进行优化。在轨道上观察到三种不同的截面,如堆积截面、w截面和高斯槽截面。在相同功率和频率的激光照射下,轨迹的形状随扫描速度的变化而变化。在激光扫描速度为100 mm/s、200mm/s和300 mm/s的条件下,分别生成堆积切片、w切片和高斯槽切片的轨迹。此外,开发了用于预测单轨深度的激光热烧蚀模型,并使用COMSOL®Multiphysics进行了模拟。模拟得到的轨迹深度预测值与实验结果吻合较好。为了获得不同形状的凸微特征,通过重叠制作相邻的单轨迹进行多轨迹分析,并对重叠距离进行优化。在不同的扫描策略下,通过去除周围材料制备出突出的微特征,发现轮廓策略产生的特征具有最小的形状误差。最后,利用优化后的工艺参数,可以制作出一系列多边形(方形、六边形)和圆形截面的突出微特征。
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Studies on fabrication of protruded multi-shaped micro-feature array on AA 6063 by laser micromachining
Miniaturization of parts of devices is the driving force for fabrication of micro-features. In this study fabrication of protruded multi-shaped micro-feature array on AA 6063 is attempted by laser micromachining. For fabricating the protruded microfeatures, the process parameters such as laser power, scanning speed and frequency of the laser beam have been optimized by considering track depth, width, and surface roughness as the output parameters. Three different cross sections in the tracks such as pileup section, W-section, and Gaussian groove section are observed. It is found that shape of the tracks vary with the scanning speed for the same power and frequency of the laser beam. The tracks of pileup section, W-section, and Gaussian groove section were produced for a laser scanning speed of 100 mm/s, 200mm/s, and 300 mm/s, respectively. Further, a laser-thermal ablative model is developed for predicting the depth of the single track and simulated using COMSOL® Multiphysics. The predicted track depths obtained from the simulations have good agreement with experimental results. In order to produce the protruded microfeatures of different shapes, multiple track analysis is done by fabricating the single tracks adjacent to one another by overlapping them, and the overlapping distance is optimized. The protruded microfeatures are then fabricated by removing the surrounding material for different scanning strategies and it is found that the contour strategy produced the features with minimal form error. Finally, it is demonstrated that an array of protruded micro-features of polygon (square, hexagon), and circular cross sections can be fabricated using the optimized process parameters for various applications.
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