用于高效可见多色光发射器的三维结构控制 InGaN 量子阱综述

IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Semiconductor Science and Technology Pub Date : 2023-12-06 DOI:10.1088/1361-6641/ad12de
M. Funato, Y. Matsuda, Y. Kawakami
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引用次数: 0

摘要

本文综述了不使用荧光粉的高效多波长发射体的三维(3D)结构控制InGaN量子阱(QWs)的发展。具体来说,综述了两种具有代表性的结构:低表面能稳定面组成的三维结构和不稳定面组成的三维结构。在研究的早期阶段,通过基于金属有机气相外延的选择性区域生长(SAG)技术在(0001)极平面上生长三维结构。由于氮化镓不能在介质掩模上生长,因此使用不同的掩模模式来创建由稳定的面平面组成的各种三维面状结构。InGaN QW参数依赖于facet平面,这导致多色发射,包括白光发射。在(0001)极平面上展示了多色led之后,通过SAG在(\=1\=12\=2)半极平面上展示了3D量子波和led。在那里,(0001)面被排除;因此,所有的面量子波都表现出较短的辐射复合寿命,这有利于未来在可见光通信中的应用。为了进一步提高三维量子阱或led发射光谱的可控性,提出了凸透镜形状的三维结构。这种结构的光滑表面是由不稳定的平面组成的,并且具有连续变化的晶体倾斜度。由于QW参数依赖于晶体倾斜,因此可以实现多色发射。该方法显示了更大的结构设计灵活性,从而有望提高发射光谱的可控性。
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A review of three-dimensional structure-controlled InGaN quantum wells for efficient visible polychromatic light emitters
This paper reviews the development of three-dimensional (3D) structure-controlled InGaN quantum wells (QWs) for highly efficient multiwavelength emitters without using phosphors. Specifically, two representative structures are reviewed: 3D structures composed of stable planes with low surface energies and 3D structures composed of unstable planes. In the early stage of the research, 3D structures were grown on the (0001) polar plane through the selective area growth (SAG) technique based on metalorganic vapor phase epitaxy. Because GaN cannot grow on dielectric masks, different mask patterns were used to create various 3D facetted structures composed of stable facet planes. The InGaN QW parameters depend on the facet planes, which led to polychromatic emission, including white-light emission. After polychromatic LEDs on the (0001) polar plane were demonstrated, 3D QWs and LEDs were also demonstrated on the (\=1\=12\=2) semipolar plane through SAG. There, the (0001) facet plane was excluded; consequently, all the facet QWs showed short radiative recombination lifetimes, which are beneficial for future applications in visible-light communication. To further enhance the controllability of the emission spectra from 3D QWs or LEDs, convex-lens-shaped 3D structures have been proposed. The smooth surface of such structures is composed of unstable planes and has continuously varying crystal tilts. Because QW parameters are dependent on the crystal tilt, polychromatic emission is achieved. This method demonstrates greater flexibility of the structure design, which is expected to result in greater controllability of emission spectra.
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来源期刊
Semiconductor Science and Technology
Semiconductor Science and Technology 工程技术-材料科学:综合
CiteScore
4.30
自引率
5.30%
发文量
216
审稿时长
2.4 months
期刊介绍: Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic. The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including: fundamental properties materials and nanostructures devices and applications fabrication and processing new analytical techniques simulation emerging fields: materials and devices for quantum technologies hybrid structures and devices 2D and topological materials metamaterials semiconductors for energy flexible electronics.
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