Aleksander Brozyniak, Karin Stadlmann, Philipp Kürnsteiner, Heiko Groiss
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引用次数: 0
摘要
用于高质量透射电子显微镜(TEM)分析的试样必须满足一系列要求,这就要求在前期制备过程中具有高精度。在这项工作中,介绍了一种用于传统 TEM 试样制备的优化程序,该程序利用了双折射材料中出现的干涉色的厚度依赖性。它有助于正确估算试样厚度,避免在机械减薄过程中出现损坏或断裂,并将离子研磨时间缩短至 30 分钟以下。在蓝宝石和碳化硅横截面样品上显示了该方法的优势。所介绍的方法同样适用于在凹陷和楔形抛光过程中评估试样厚度,尤其适用于厚度低于 20 μm 的试样,因为在这种情况下机械技术的精确度不够。该方法足够精确,可用于减薄过程中的目测厚度估算,还可通过分析出现的干涉色的 RGB 光谱进行优化。
Optimized procedure for conventional TEM sample preparation using birefringence
Specimens for quality transmission electron microscopy (TEM) analyses must fulfil a range of requirements, which demand high precision during the prior preparation process. In this work, an optimized procedure for conventional TEM specimen preparation is presented that exploits the thickness-dependence of interference colors occurring in birefringent materials. It facilitates the correct estimation of specimen thickness to avoid damage or breaking during mechanical thinning and reduces ion-milling times below 30 min. The benefits of the approach are shown on sapphire and silicon carbide cross-section samples. The presented method is equally suitable for assessing specimen thickness during dimpling and wedge-polishing, and is particularly useful at thicknesses below 20 µm, where the accuracy of mechanical techniques is insufficient. It is precise enough to be employed for a visual thickness estimation during the thinning process, but can be additionally optimized by analyzing the RGB spectrum of the occurring interference colors.
期刊介绍:
Micron is an interdisciplinary forum for all work that involves new applications of microscopy or where advanced microscopy plays a central role. The journal will publish on the design, methods, application, practice or theory of microscopy and microanalysis, including reports on optical, electron-beam, X-ray microtomography, and scanning-probe systems. It also aims at the regular publication of review papers, short communications, as well as thematic issues on contemporary developments in microscopy and microanalysis. The journal embraces original research in which microscopy has contributed significantly to knowledge in biology, life science, nanoscience and nanotechnology, materials science and engineering.