同源差分透射率和反射率测量仪的新方案

Deng Liu, Shirong Chen, Dingbo Chen, Zhongqi Tan
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摘要

为了提高差分透射率和反射率测量仪(DFTRM)在测量透射或反射损耗极低的镀膜反射镜时的性能,我们展示了一种基于菲涅尔公式和光学平衡的新方案。得益于菲涅尔公式的特点,即参考光学表面的镜面反射率随入射角变化缓慢,接近布儒斯特角,因此在我们的双光路方案中,透射率或反射率的精确测量可转换为入射角的精确测量。为了验证精确测量的可行性,我们建立了一个实验系统,对具有低透射损失的高反射率镀膜反射镜的初步测量结果证明,该系统能够测量透射率并分辨出百万分之十(ppm)量级的透射率差异。此外,还定性或定量地讨论了各种潜在的误差源,包括光电二极管的响应率、比例因子、入射激光的偏振、参考介质的折射率以及各组件的空间关系等,为今后优化透射率和反射率ppm 级测量仪提供指导。
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A novel scheme of homologous differential transmissivity and reflectivity measurer
To improve the performance of differential transmissivity & reflectivity measurer (DFTRM) for coated mirrors with extremely low transmission or reflection loss, a novel scheme based on Fresnel formula and optical balance is demonstrated. Benefit from the characteristic of Fresnel formula, i.e., the specular reflectivity of the reference optical surface varies slowly with the incident angle near Brewster’s angle, so the precision measurement of transmissivity or reflectivity is then converted to the precision measurement of the incident angle in our two-optical-path scheme. An experimental system is set up to verify the feasibility of precision measurement, and the preliminary measurement results for high-reflectivity coated mirrors with low transmission loss prove its ability to measure transmissivity and distinguish the transmissivity difference of 10 parts per million (ppm) magnitude. Various potential error sources, including the responsivity of photodiodes, the scale factor, the polarization of the incident laser, the refractive index of the reference medium and the spatial relationship of components, are discussed qualitatively or quantitatively to provide guidance for the subsequent optimization of transmissivity & reflectivity measurer at ppm level in the future.
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