镓和硼共掺杂对氧化锌薄膜性能协同效应的系统研究

Kenan Özel, A. Atilgan
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摘要

本文通过旋涂法在玻璃基底上成功沉积了不同镓和硼掺杂百分比的镓和硼共掺杂氧化锌薄膜。该研究系统地探讨了掺杂含量对共掺杂氧化锌薄膜的结构、形貌、光学和电学特性的影响。表征结果表明,掺杂含量对共掺杂 ZnO 薄膜的特征有深远的影响。X 射线衍射图样证实了薄膜的多晶性质,其衍射峰强度各不相同。原子力显微镜图像显示薄膜表面光滑,表面粗糙度低。紫外-可见-近红外透射光谱显示,沉积薄膜在 400-800 纳米波长范围内具有 86% 以上的高透明度,具有优异的光学特性。电阻测量结果表明,掺杂浓度为 2.5 % Ga 和 0.5 % B 的共掺杂氧化锌薄膜的电阻率较低,而且样品的电阻率受掺杂含量的影响很大。本研究获得的知识对于制造基于氧化锌薄膜的高性能光电器件非常重要。
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Systematic investigation on the synergistic effect of gallium and boron co-doping on the properties of ZnO thin films
Herein, gallium and boron co-doped ZnO thin films of varying percentages of Ga and B doping content were successfully deposited on glass substrates via spin coating method. The impact of doping content on structural, morphological, optical, and electrical features of co-doped ZnO films was systematically probed in this work. The characterization results demonstrate that the doping content has a profound effect on the features of co-doped ZnO thin films. The X-ray diffraction patterns confirm the polycrystalline nature of the films with varying diffraction peak intensities. AFM images disclose the smooth surface of the films with low surface roughness. UV–Vis-NIR transmittance spectra reveal that the deposited films exhibit high transparency over 86 % in range of 400-800 nm wavelength with excellent optical properties. The electrical resistance measurements indicate that co-doped ZnO thin films having doping concentrations of 2.5 at. % of Ga and 0.5 at. % of B has the lower resistivity, and the resistivity of the samples are strongly affected by the doping content. The obtained knowledge from this study could be important for the fabrication of high-performance optoelectronic device based on ZnO thin films.
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