电信业操作侧和半导体制造过程中硬烘烤工艺下倾斜分布的控制理论

A. Zaka, R. Jabeen, Mashhood Ahmad, Hassan M. Aljohani, Maha M. Helmi
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引用次数: 0

摘要

统计流程控制的基本内容是对流程输出的随机样本进行检查,并确定流程生产的产品是否具有预定范围内的特征。它被广泛应用于可靠性工程领域。使用 SPC 可以对生产过程的可靠性进行全面监控,以防止出现任何内部变化。其目的始终是通过适当的控制监测来解决这些变化。如果研究人员知道生产过程的基本分布,那么使用参数控制图是有用的,但在许多情况下,如果对生产过程的分布存在疑问,那么最好使用非参数控制图。本文提出了修正指数加权移动平均线(EWMA)、双指数加权移动平均线(DEWMA)、混合指数加权移动平均线(HEWMA)和扩展指数加权移动平均线(EEWMA)、修正指数加权移动平均线(MEWMA)和混合型控制图,将这些控制图与图基控制图 EWMA-TCC、DEWMA-TCC、HEWMA-TCC、EEWMA-TCC、MEWMA-TCC 混合,以获得库马拉斯瓦米-莱曼-2 幂函数分布(KL2PFD)的形状参数。
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Control theory for skewed distribution under operation side of the telecommunication industry and hard-bake process in the semiconductor manufacturing process
Statistical process control basically involves inspecting a random sample of the output from a process and deciding whether the process is producing products with characteristics that fall within a predetermined range. It is used extensively in the field of reliability engineering. The reliability of the production process is thoroughly monitored for any internal variation using the SPC. The aim is always to settle such variations through a proper control monitoring. If the underlying distribution of the process is known to the researcher than the use of parametric control charts are useful but in many cases when there is doubt about the distribution of the process then it is preferred to use non parametric control charts. In this paper we propose the modified Exponentially weighted moving average (EWMA), Double Exponentially weighted moving average (DEWMA), Hybrid Exponentially weighted moving average (HEWMA), Extended Exponentially weighted moving average (EEWMA), Modified Exponentially weighted moving average (MEWMA) and mix- type control charts by mixing these control charts with Tukey control chart EWMA-TCC, DEWMA-TCC, HEWMA-TCC, EEWMA-TCC, MEWMA-TCC for the shape parameter of the Kumaraswamy Lehmann-2 Power function distribution (KL2PFD).
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