半导体氧化物材料 Ga2O3、In2O3、ZnO 与金属熔体在真空中的润湿和接触相互作用

M. Grigorenko, E. Chernigovtsev, O. Durov, V. Poluyanska, A. Ievtushenko
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摘要

镓、铟和锌氧化物等半导体氧化物材料在各种电子设备的开发和生产中发挥着重要作用。通过对这些材料的实验研究,可以确定所制造设备的能量或其他物理参数,还可以改进现有的生产、金属化和通过钎焊连接电接触的技术,这些都需要额外的润湿研究。值得注意的是,文献中几乎没有关于上述氧化物与金属润湿的数据。因此,我们采用无柄液滴法,通过光电和视频固定,包括接触角的时间和温度依赖性,对 Ga2O3、In2O3 和 ZnO 氧化物材料与一些纯金属熔体(Ga、In、Sn、Au、Ge、Ag、Cu)在真空中的界面相互作用、粘附和润湿进行了详细的实验研究。研究发现,在所研究的温度范围内,纯金属不会润湿 Ga 和 In 氧化物的粉末压制试样,而且变化范围相当小。对于氧化锌体系,实验温度和保持时间对某些金属(Ga、Ge、Sn、Cu)的接触角值有显著影响。例如,镓的润湿角从低温下的 90 度以上变为 49 度,在 1173-1373 K 时完全扩散。这种影响可能是由于化学反应的激活、界面高温下氧化物稳定性的变化。最后一种金属可用作基础钎焊合金的粘合活性添加剂。关键词:镓、铟、锌氧化物、半导体、润湿、接触相互作用、金属熔体。
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Wetting and contact interaction of semconductor oxide materials Ga2O3, In2O3, ZnO with metallic melts in vacuum
Semiconductor oxide materials such as gallium, indium and zinc oxides play an important role in a development and production of a variety of electronic devices. Experimental studies of these materials allow to define, for example energetic or other physical parameters of the devices created and also to improve existing technologies of their production, metallization and joining of electrocontacts by way of brazing which require additional wetting studies. It should be noted that data on wetting of mentioned oxides by metals are practically absent in literature. Thus a detailed experimental study of the interfacial interaction, adhesion and wetting of Ga2O3, In2O3 and ZnO oxide materials with some pure metal melts (Ga, In, Sn, Au,Ge, Ag, Cu) in vacuum was performed by the sessile drop method using photo- and video- fixing including temporal and temperature dependencies of contact angles. It was found that pure metals don't wet powdery pressed specimens of Ga and In oxides in the temperature range studied and vary in a rather narrow range. For ZnO system the significant effect of experiment temperature and hold-up time on the values of contact angles for some metals (Ga, Ge, Sn, Cu) is observed. For example wetting angles for Ga change from above 90 degrees at low temperatures up to 49 and full spreading at 1173⎯1373 K. This effect may be attributed to the activation of chemical reactions, change of oxide stabilities at high temperatures at the interface. Last metals can be used as adhesive-active additions to base brazing alloy. Keywords: gallium, indium, zinc oxides, semiconductor, wetting, contact interaction, metal melt.
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