用于近红外激光应用的高性能 IBS 涂层研究

Laser Damage Pub Date : 2023-11-24 DOI:10.1117/12.2685243
Alex Ribeaud, Jürgen Pistner, Mathias Soulier, Julien Lumeau, Laurent Gallais, Rico Benz, Christoph Sturzenegger, B. Eiermann, Christian Mühlig, Thomas Gischkat, Sven Schröder
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引用次数: 0

摘要

在许多激光应用中,由于吸收和散射是造成各种激光损伤的因素,因此对减少损耗的高效涂层的需求越来越高。离子束溅射 (IBS) 是一种已知的技术,可提供这种高光学质量的薄膜。事实上,它可以实现低吸收和低散射的高密度镀层。在这项工作中,使用布勒 IBS 技术开发了各种涂层。然后,使用腔环向下法测量了总损耗,使用激光诱导偏转或激光热成像仪测量了吸收,并使用专用散射计测量了总综合散射。所选沉积方法和参数的影响与测量性能之间存在相关性,目的是更好地了解涂层中损耗的水平和来源。最后,采用不同的设计和沉积参数制作了波长为 1064 nm 的高反射镜涂层。本文介绍并讨论了使用不同设备对吸收、散射和总损耗进行不同测量的结果。
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Study of high-performance IBS coatings for near-IR laser applications
In many laser applications, there is a higher and higher demand for more efficient coatings with reduced losses, in terms of absorption and scattering as those are contributing factors to diverse laser damage regimes. Ion Beam Sputtering (IBS) is a known technique to provide such high optical quality thin films. Indeed, it allows to achieve high density layers with low absorption and scattering. In this work, various coatings were developed using Bühler IBS technology. Then, total losses were measured using Cavity Ring Down, absorption using Laser Induced Deflection or Laser thermography, and Total Integrated Scatter using dedicated scatterometers. A correlation between the effect of the chosen deposition method and parameters and the measurement performances were made with the aim of a better understanding of the level and the origin of losses in the coatings. Finally, highly reflecting mirror coatings for 1064 nm wavelength were fabricated with different designs and deposition parameters. The results of the different measurements of absorption, scattering and total losses using different equipment are presented and discussed.
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