采用双栅极控制机制的双向可控硅器件,用于光电芯片的 ESD 保护

IF 16.4 1区 化学 Q1 CHEMISTRY, MULTIDISCIPLINARY Accounts of Chemical Research Pub Date : 2024-01-04 DOI:10.1088/1361-6641/ad1b18
Yujie Liu, Yang Wang, Jian Yang, Xiangliang Jin
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引用次数: 0

摘要

双向硅控整流器(DDSCR)是一种静电放电(ESD)保护装置。它可以提供正负静电放电浪涌通路,具有出色的稳健性。然而,在强电磁干扰环境中工作的工业级传感器对光电芯片的可靠性提出了更高的要求。本文提出了一种具有双栅极控制机制的新型 DDSCR。通过在传统 DDSCR 中加入栅极二极管触发和栅极场调制机制,并进一步利用额外的寄生 PNP 晶体管进行分流,该器件的 ESD 特性得到了显著改善。测量结果表明,与 DDSCR 相比,该器件的触发电压 (Vt1) 降低了 27.5%,保持电压 (Vh) 提高了 96.1%,等效人体模型 (HBM) 保护水平达到了 11.45 kV,显示出卓越的设计面积效率。实验结果验证了所提器件在 5 V 光电芯片应用中的有效性。
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Dual-directional SCR device with dual-gate controlled mechanism for ESD protection in photoelectric chip
The dual-directional silicon-controlled rectifier (DDSCR) is an electrostatic discharge (ESD) protection device. It can provide positive and negative ESD surge paths and has excellent robustness. However, industry-level sensors operating in strong electromagnetic interference environments impose higher reliability requirements on photoelectric chips. This paper proposed a novel DDSCR with a dual-gate controlled mechanism. By incorporating the gate diode triggering and the gate field modulation mechanism into the traditional DDSCR, and further utilizing additional parasitic PNP transistors for diversion, the proposed device exhibits significantly improved ESD characteristics. Measurement results indicate that, compared to DDSCR, the proposed device exhibits a 27.5% reduction in trigger voltage (Vt1), a 96.1% improvement in holding voltage (Vh), and achieves an equivalent Human Body Model (HBM) protection level of 11.45 kV, demonstrating exceptional design area efficiency. The experimental findings validate the effectiveness of the proposed device in 5 V photoelectric chip applications.
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来源期刊
Accounts of Chemical Research
Accounts of Chemical Research 化学-化学综合
CiteScore
31.40
自引率
1.10%
发文量
312
审稿时长
2 months
期刊介绍: Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
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