用于低压静电放电保护的新型低触发电压低漏电可控硅

IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Semiconductor Science and Technology Pub Date : 2024-01-04 DOI:10.1088/1361-6641/ad1b14
Jizhi Liu, FEILONG YANG, YILIN LIU
{"title":"用于低压静电放电保护的新型低触发电压低漏电可控硅","authors":"Jizhi Liu, FEILONG YANG, YILIN LIU","doi":"10.1088/1361-6641/ad1b14","DOIUrl":null,"url":null,"abstract":"\n Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.","PeriodicalId":21585,"journal":{"name":"Semiconductor Science and Technology","volume":"2 15","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2024-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel low trigger voltage low leakage SCR for low-voltage ESD protection\",\"authors\":\"Jizhi Liu, FEILONG YANG, YILIN LIU\",\"doi\":\"10.1088/1361-6641/ad1b14\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.\",\"PeriodicalId\":21585,\"journal\":{\"name\":\"Semiconductor Science and Technology\",\"volume\":\"2 15\",\"pages\":\"\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2024-01-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Science and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6641/ad1b14\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6641/ad1b14","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

降低触发电压一直是集成电路低压静电放电(ESD)保护应用的研究热点。因此,我们提出了一种用于低压静电放电保护的新型低触发电压低漏电可控硅整流器(LTVLLSCR)。该器件使用与可控硅相连的 PMOS 来降低触发电压,PMOS 栅极可通过电源电压进一步降低触发电压和泄漏电流。通过人体模型仿真讨论了所提器件的工作原理和物理机制。在 55 nm CMOS 工艺中验证了所提器件的 ESD 特性。实验结果表明,在外部偏压的作用下,该器件的触发电压最低可达 2.86 V,25 ℃ 时的漏电流约为 1 nA,在外部偏压的作用下可降低 13%。LTVLLSCR 具有更低的触发电压、更低的漏电流、更小的 ESD 设计窗口和良好的 ESD 鲁棒性,非常适合 1 V 低电压应用。
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A novel low trigger voltage low leakage SCR for low-voltage ESD protection
Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.
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来源期刊
Semiconductor Science and Technology
Semiconductor Science and Technology 工程技术-材料科学:综合
CiteScore
4.30
自引率
5.30%
发文量
216
审稿时长
2.4 months
期刊介绍: Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic. The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including: fundamental properties materials and nanostructures devices and applications fabrication and processing new analytical techniques simulation emerging fields: materials and devices for quantum technologies hybrid structures and devices 2D and topological materials metamaterials semiconductors for energy flexible electronics.
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