{"title":"用于低压静电放电保护的新型低触发电压低漏电可控硅","authors":"Jizhi Liu, FEILONG YANG, YILIN LIU","doi":"10.1088/1361-6641/ad1b14","DOIUrl":null,"url":null,"abstract":"\n Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.","PeriodicalId":21585,"journal":{"name":"Semiconductor Science and Technology","volume":"2 15","pages":""},"PeriodicalIF":1.9000,"publicationDate":"2024-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel low trigger voltage low leakage SCR for low-voltage ESD protection\",\"authors\":\"Jizhi Liu, FEILONG YANG, YILIN LIU\",\"doi\":\"10.1088/1361-6641/ad1b14\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.\",\"PeriodicalId\":21585,\"journal\":{\"name\":\"Semiconductor Science and Technology\",\"volume\":\"2 15\",\"pages\":\"\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2024-01-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Science and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6641/ad1b14\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6641/ad1b14","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A novel low trigger voltage low leakage SCR for low-voltage ESD protection
Reducing trigger voltage has always been a research hotspot in low-voltage electrostatic discharge (ESD) protection applications for integrated circuit. Thus, a novel low trigger voltage low leakage silicon-controlled rectifier (LTVLLSCR) for low-voltage ESD protection has been proposed. The proposed device uses a PMOS connected with the SCR to reduce the trigger voltage and the PMOS gate can be applied with the supply voltage to further reduce the trigger voltage and the leakage current. The operating principle and the physical mechanism of the proposed device were discussed by the Human Body Model simulation. The ESD characteristics of the proposed device were verified in 55 nm CMOS process. The experimental results demonstrate that the trigger voltage of the proposed device can reach a minimum of 2.86 V with an external bias, and the leakage current at 25 ℃ is about 1 nA which can be reduced by 13% with an external bias. With lower trigger voltage, lower leakage, smaller ESD design window and good ESD robustness, the LTVLLSCR is very suitable for 1 V low voltage applications.
期刊介绍:
Devoted to semiconductor research, Semiconductor Science and Technology''s multidisciplinary approach reflects the far-reaching nature of this topic.
The scope of the journal covers fundamental and applied experimental and theoretical studies of the properties of non-organic, organic and oxide semiconductors, their interfaces and devices, including:
fundamental properties
materials and nanostructures
devices and applications
fabrication and processing
new analytical techniques
simulation
emerging fields:
materials and devices for quantum technologies
hybrid structures and devices
2D and topological materials
metamaterials
semiconductors for energy
flexible electronics.