利用环境和原子分辨率 STEM 进行深度剖析。

Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi
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引用次数: 0

摘要

(通过氮化硅膜的环境电池(EC)获取气体和液体介质中样品的(扫描)透射电子显微镜(TEM)图像。样品信号与背景的比率是影响分辨率的重要因素。深度截面扫描 TEM(STEM)是一种很有前途的技术,它能增强嵌入基质中的样品的信号。它能将分辨率提高到原子水平,从而使 EC-STEM 应用于重要领域。本综述将介绍深度截面 STEM 及其在气体和液体样品高分辨率 EC-STEM 成像中的应用。
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Depth sectioning using environmental and atomic-resolution STEM.

(Scanning) transmission electron microscopy (TEM) images of samples in gas and liquid media are acquired with an environmental cell (EC) via silicon nitride membranes. The ratio of sample signal against the background is a significant factor for resolution. Depth-sectioning scanning TEM (STEM) is a promising technique that enhances the signal for a sample embedded in a matrix. It can increase the resolution to the atomic level, thereby enabling EC-STEM applications in important areas. This review introduces depth-sectioning STEM and its applications to high-resolution EC-STEM imaging of samples in gases and in liquids.

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