基于双源堆栈侧向 TFET 的气体传感器灵敏度分析

George Mili, Zohming Liana, Brinda Bhowmick
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摘要

与其他传感技术相比,金属氧化物半导体气体传感器因其耐用性、寿命长和传感能力强而被广泛应用于各个领域。本研究提出了一种用于气体传感应用的双层异质源侧向 n 型隧道场效应晶体管(DSHS-nTFET)。在该器件的隧道结中,源堆的存在增强了电场,降低了隧道宽度,然后增强了带间隧道。为了检测特定气体,我们对这种双源堆叠 TFET 设计中用作栅极触点的催化金属进行了探索。铂 (Pt)、钴 (Co)、钯 (Pd) 和银 (Ag) 是用于感应目标气体的金属栅极电极,这些气体分别是一氧化碳 (CO)、氨 (NH3)、氢 (H2) 和氧 (O2)。在 Sentaurus TCAD 模拟器的帮助下,对所建议的结构进行了一系列电气参数的检测,包括电场、表面电位、漏极电流以及与气体分子吸附有关的多种传感特性。此外,还研究了拟议传感器对温度波动的灵敏度和可靠性,结果表明该器件在 200-400 K 范围内基本稳定。
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Sensitivity Analysis of a Double Source Stack Lateral TFET-Based Gas Sensor
Metal oxide semiconductor gas sensors are used in various roles and sectors compared to other sensing technology due to their durability, longevity, and sensing capability. The current work proposes a dual-stacked heterogeneous source lateral n-type tunnel field-effect transistor (DSHS-nTFET) for gas sensing applications. In the device’s tunneling junction, the presence of source stack boosts the electric field, reduces tunneling width, and then enhances the band-to-band tunneling. Catalytic metals used as gate contacts for this double source stacking TFET design are explored for the purpose of detecting specific gases. Platinum (Pt), Cobalt (Co), Palladium (Pd), and Silver (Ag) are the metal gate electrodes utilised to sense the target gases, like Carbon-monoxide (CO), Ammonia (NH3), Hydrogen (H2), and Oxygen (O2), respectively. With the aid of the Sentaurus TCAD simulator, the suggested structure has been examined for a number of electrical parameters including electric field, surface potential, drain current, and numerous sensing characteristics pertaining to adsorption of gas molecules. The sensitivity and reliability of the proposed sensor have also been investigated with respect to temperature fluctuations, and it has been shown that the device is largely stable over the 200–400 K range.
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