Quasi-statically actuated MEMS scanner with concentric vertical comb electrodes

A quasi-static (QS) MEMS mirror scanner with concentric vertical combs (CVC) is presented. The increase rate of overlapped area of the CVC, tends to show larger values and more uniform than that of conventional vertical combs, resulting in improved linearity and scanning angle, respectively. In this paper, the performance of the QS scanner with CVC, whose equivalent mirror diameter is 3.9 mm, was theoretically analyzed and compared with the fabricated one and also other types of vertical combs such as staggered vertical combs (SVC) and angular vertical combs (AVC). The linearity was less than 0.1%, and the average value of the experimental OSA (optical scanning angle) was up to 13.5 degrees, which is only 1/3 and 39% larger than other scanners, respectively, under the condition that the configuration and dimension of each MEMS scanner is similar each other.