{"title":"用于量子光学磁力测量的单片集成三维原子芯片","authors":"Ziji Wang;Junming Wu;Gong Sun;Jintang Shang","doi":"10.1109/JMEMS.2023.3337513","DOIUrl":null,"url":null,"abstract":"A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"102-109"},"PeriodicalIF":2.5000,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry\",\"authors\":\"Ziji Wang;Junming Wu;Gong Sun;Jintang Shang\",\"doi\":\"10.1109/JMEMS.2023.3337513\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]\",\"PeriodicalId\":16621,\"journal\":{\"name\":\"Journal of Microelectromechanical Systems\",\"volume\":\"33 1\",\"pages\":\"102-109\"},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2023-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Microelectromechanical Systems\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10342695/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10342695/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry
A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]
期刊介绍：
The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.
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