{"title":"通过薄层结晶成核的低缺陷密度 SnSe2 薄膜","authors":"S.A. Ponomarev , K.E. Zakhozhev , D.I. Rogilo , A.K. Gutakovsky , N.N. Kurus , K.A. Kokh , D.V. Sheglov , A.G. Milekhin , A.V. Latyshev","doi":"10.1016/j.jcrysgro.2024.127615","DOIUrl":null,"url":null,"abstract":"<div><p>We have studied the structural and morphological features of SnSe<sub>2</sub> films grown on Si(111) and Bi<sub>2</sub>Se<sub>3</sub>(0001) surfaces in an <em>in situ</em> reflection electron microscope. On both substrates, the SnSe<sub>2</sub> growth started at 100 °C as an amorphous layer, and when thickness reached 1 nm, crystallized by raising the growth temperature to 250 °C without interruption of Sn and Se fluxes. The introduction of this growth-initiating stage has decreased the concentration of screw dislocations on films’ surfaces to ∼18 and ∼2 μm<sup>−2</sup> for the Si(111) and Bi<sub>2</sub>Se<sub>3</sub>(0001) substrates, respectively. High-resolution transmission electron microscopy investigation has shown that the layered SnSe<sub>2</sub> film has a hexagonal lattice structure corresponding to the space group <span><math><mrow><mtext>P</mtext><mover><mrow><mn>3</mn></mrow><mrow><mo>¯</mo></mrow></mover><mtext>m</mtext><mn>1</mn></mrow></math></span> (no. 164) with lattice parameters <em>a</em> = 0.38 nm and <em>c</em> = 0.62 nm. Raman spectroscopy has shown vibrational modes corresponding to the 1T-SnSe<sub>2</sub> phase. We have shown that the decrease in Se:Sn flux ratio switches growth mode from Frank—van der Merwe type SnSe<sub>2</sub> epitaxy to Volmer—Weber type nucleation of SnSe 3D islands.</p></div>","PeriodicalId":353,"journal":{"name":"Journal of Crystal Growth","volume":null,"pages":null},"PeriodicalIF":1.7000,"publicationDate":"2024-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Low-defect-density SnSe2 films nucleated via thin layer crystallization\",\"authors\":\"S.A. Ponomarev , K.E. Zakhozhev , D.I. Rogilo , A.K. Gutakovsky , N.N. Kurus , K.A. Kokh , D.V. Sheglov , A.G. Milekhin , A.V. Latyshev\",\"doi\":\"10.1016/j.jcrysgro.2024.127615\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>We have studied the structural and morphological features of SnSe<sub>2</sub> films grown on Si(111) and Bi<sub>2</sub>Se<sub>3</sub>(0001) surfaces in an <em>in situ</em> reflection electron microscope. On both substrates, the SnSe<sub>2</sub> growth started at 100 °C as an amorphous layer, and when thickness reached 1 nm, crystallized by raising the growth temperature to 250 °C without interruption of Sn and Se fluxes. The introduction of this growth-initiating stage has decreased the concentration of screw dislocations on films’ surfaces to ∼18 and ∼2 μm<sup>−2</sup> for the Si(111) and Bi<sub>2</sub>Se<sub>3</sub>(0001) substrates, respectively. High-resolution transmission electron microscopy investigation has shown that the layered SnSe<sub>2</sub> film has a hexagonal lattice structure corresponding to the space group <span><math><mrow><mtext>P</mtext><mover><mrow><mn>3</mn></mrow><mrow><mo>¯</mo></mrow></mover><mtext>m</mtext><mn>1</mn></mrow></math></span> (no. 164) with lattice parameters <em>a</em> = 0.38 nm and <em>c</em> = 0.62 nm. Raman spectroscopy has shown vibrational modes corresponding to the 1T-SnSe<sub>2</sub> phase. We have shown that the decrease in Se:Sn flux ratio switches growth mode from Frank—van der Merwe type SnSe<sub>2</sub> epitaxy to Volmer—Weber type nucleation of SnSe 3D islands.</p></div>\",\"PeriodicalId\":353,\"journal\":{\"name\":\"Journal of Crystal Growth\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.7000,\"publicationDate\":\"2024-02-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Crystal Growth\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0022024824000502\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"CRYSTALLOGRAPHY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Crystal Growth","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0022024824000502","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CRYSTALLOGRAPHY","Score":null,"Total":0}
引用次数: 0
摘要
我们在原位反射电子显微镜下研究了在Si(111)和Bi2Se3(0001)表面生长的SnSe2薄膜的结构和形态特征。在这两种基底上,SnSe2 在 100 ℃ 时以无定形层开始生长,当厚度达到 1 nm 时,在不中断 Sn 和 Se 通量的情况下,通过将生长温度升高到 250 ℃ 而结晶。在 Si(111) 和 Bi2Se3(0001) 基底上,这一生长启动阶段的引入使薄膜表面的螺旋位错浓度分别降至 ∼18 和 ∼2 μm-2。高分辨率透射电子显微镜研究表明,层状 SnSe2 薄膜具有六方晶格结构,对应于空间群 P3¯m1(编号 164),晶格参数 a = 0.38 nm 和 c = 0.62 nm。拉曼光谱显示了与 1T-SnSe2 相对应的振动模式。我们已经证明,Se:Sn 通量比的降低会将生长模式从 Frank-van der Merwe 型 SnSe2 外延转换为 Volmer-Weber 型 SnSe 3D 岛状成核。
Low-defect-density SnSe2 films nucleated via thin layer crystallization
We have studied the structural and morphological features of SnSe2 films grown on Si(111) and Bi2Se3(0001) surfaces in an in situ reflection electron microscope. On both substrates, the SnSe2 growth started at 100 °C as an amorphous layer, and when thickness reached 1 nm, crystallized by raising the growth temperature to 250 °C without interruption of Sn and Se fluxes. The introduction of this growth-initiating stage has decreased the concentration of screw dislocations on films’ surfaces to ∼18 and ∼2 μm−2 for the Si(111) and Bi2Se3(0001) substrates, respectively. High-resolution transmission electron microscopy investigation has shown that the layered SnSe2 film has a hexagonal lattice structure corresponding to the space group (no. 164) with lattice parameters a = 0.38 nm and c = 0.62 nm. Raman spectroscopy has shown vibrational modes corresponding to the 1T-SnSe2 phase. We have shown that the decrease in Se:Sn flux ratio switches growth mode from Frank—van der Merwe type SnSe2 epitaxy to Volmer—Weber type nucleation of SnSe 3D islands.
期刊介绍:
The journal offers a common reference and publication source for workers engaged in research on the experimental and theoretical aspects of crystal growth and its applications, e.g. in devices. Experimental and theoretical contributions are published in the following fields: theory of nucleation and growth, molecular kinetics and transport phenomena, crystallization in viscous media such as polymers and glasses; crystal growth of metals, minerals, semiconductors, superconductors, magnetics, inorganic, organic and biological substances in bulk or as thin films; molecular beam epitaxy, chemical vapor deposition, growth of III-V and II-VI and other semiconductors; characterization of single crystals by physical and chemical methods; apparatus, instrumentation and techniques for crystal growth, and purification methods; multilayer heterostructures and their characterisation with an emphasis on crystal growth and epitaxial aspects of electronic materials. A special feature of the journal is the periodic inclusion of proceedings of symposia and conferences on relevant aspects of crystal growth.