Tim M Schwarz, Eric Woods, Mahander P Singh, Xinren Chen, Chanwon Jung, Leonardo S Aota, Kyuseon Jang, Mathias Krämer, Se-Ho Kim, Ingrid McCarroll, Baptiste Gault
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引用次数: 0
摘要
原子探针层析成像需要直径通常小于 100 nm 的针状试样,因此试样非常容易损坏,而且反应灵敏,众所周知,缺陷(晶界缺口或析出物)会影响成品率和数据质量。有人建议直接在锐化试样上使用保形涂层,以提高成品率并减少背景。然而,迄今为止,这些涂层都是在原位应用的,而且大多不均匀。在此,我们报告了在试样制备完成后立即在试样上进行可控聚焦离子束原位沉积金属薄膜的情况。不同的金属目标(如铬)通过传统的提升方法附着在微型机械手上,并使用 Ga 或 Xe 离子进行溅射。我们展示了从金属材料到非金属材料试样涂层的诸多优势。我们确定了数据质量和产量的提高、质量分辨率的改善以及有效视场的增加。更宽的视场使整个原始试样可视化,从而可以检测试样周围的整个表面氧化层。这种方法易于实施,因此非常适合在各种原子探针分析中推广使用。
In Situ Metallic Coating of Atom Probe Specimen for Enhanced Yield, Performance, and Increased Field-of-View.
Atom probe tomography requires needle-shaped specimens with a diameter typically below 100 nm, making them both very fragile and reactive, and defects (notches at grain boundaries or precipitates) are known to affect the yield and data quality. The use of a conformal coating directly on the sharpened specimen has been proposed to increase yield and reduce background. However, to date, these coatings have been applied ex situ and mostly are not uniform. Here, we report on the controlled focused-ion beam in situ deposition of a thin metal film on specimens immediately after specimen preparation. Different metallic targets e.g. Cr were attached to a micromanipulator via a conventional lift-out method and sputtered using Ga or Xe ions. We showcase the many advantages of coating specimens from metallic to nonmetallic materials. We have identified an increase in data quality and yield, an improvement of the mass resolution, as well as an increase in the effective field-of-view. This wider field-of-view enables visualization of the entire original specimen, allowing to detect the complete surface oxide layer around the specimen. The ease of implementation of the approach makes it very attractive for generalizing its use across a very wide range of atom probe analyses.
期刊介绍:
Microscopy and Microanalysis publishes original research papers in the fields of microscopy, imaging, and compositional analysis. This distinguished international forum is intended for microscopists in both biology and materials science. The journal provides significant articles that describe new and existing techniques and instrumentation, as well as the applications of these to the imaging and analysis of microstructure. Microscopy and Microanalysis also includes review articles, letters to the editor, and book reviews.