Ruilin Cui, Tianliang Zhang, Feng He, Bocong Zheng, J. Ouyang
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引用次数: 0
摘要
本文通过实验和理论研究了氩氦等离子体在一个没有任何反射端板的系统中被半直角螺旋激发时,在射频(RF)功率和外磁场不断增加的情况下的多种波模式和转换。实验表明,在临界磁场强度和压力(本研究中约为 250 G 和 0.3 Pa)之上,随着射频功率和/或磁场的增加,可观察到两到四种不同的波耦合模式和转换。基于频散关系的理论分析表明,在高磁场中,最低阶轴向特征模式的螺旋波总是首先被激发,然后是高阶轴向或径向模式,因此模式跃迁后等离子体密度会增加。本系统中的波模转换有两种机制,即轴向和径向模式转换,导致轴向和径向波文数从较低的特征模式变为较高的特征模式。较高的等离子体密度和磁场有助于获得更多的高阶螺旋波模式。
On the wave mode transition of argon helicon plasma
In this paper, multiple wave modes and transitions of argon helicon plasma excited by a half right-helical in a system without any reflection endplate are investigated experimentally and theoretically at increasing radio frequency (RF) powers and external magnetic fields. Experiments show that above a critical magnetic field strength and pressure (about 250 G and 0.3 Pa in this work), two to four distinct wave coupled modes and transitions were observed at increasing RF powers and/or magnetic fields. Theoretical analysis based on dispersion relationship show that in high magnetic field helicon wave of the lowest order of axial eigenmode is always excited firstly, then the higher order axial or radial mode, hence the plasma density increases after mode jumping. There are two mechanisms responsible for the wave mode transitions in the present system, i.e., axial and radial mode transitions owning to the change of axial and radial wavenumbers from a lower eigenmode to a higher one. Higher plasma density and magnetic field are helpful for achieving more higher-order modes of helicon waves.