{"title":"TMR 高温超导体复合磁传感器及其性能优化","authors":"Yue Wu , Liye Xiao , Siyuan Han , Jiamin Chen","doi":"10.1016/j.cryogenics.2024.103810","DOIUrl":null,"url":null,"abstract":"<div><p>Tunnel magnetoresistance (TMR), recognized for its high sensitivity and low power consumption, holds significant promise in the domain of weak magnetic field detection. Using superconducting materials as magnetic concentrators can achieve several hundred to even a thousandfold amplification of magnetic fields, making it one of the most effective approaches to enhance the magnetic field resolution of TMR sensors. This paper utilized the flip-chip bonding process to integrate TMR with the high-temperature superconductor YBCO (YBa2Cu3O7-δ), and successfully developed TMR-YBCO composite magnetic sensor. Building upon this foundation, through optimization of the fabrication process and the pioneering use of a structural design incorporating the filling of annular holes with superconducting concentrators, the sensitivity of the sensor was further enhanced. Finally, the magnetic field resolution was increased by 1030 times compared to TMR sensors, reached to 2.9pT/Hz1/2 at 1 Hz. Simultaneously, results from frequency band testing indicated excellent frequency band characteristics, with a frequency response range exceeding kHz.</p></div>","PeriodicalId":10812,"journal":{"name":"Cryogenics","volume":null,"pages":null},"PeriodicalIF":1.8000,"publicationDate":"2024-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TMR-high-temperature superconductor composite magnetic sensor and its performance optimization\",\"authors\":\"Yue Wu , Liye Xiao , Siyuan Han , Jiamin Chen\",\"doi\":\"10.1016/j.cryogenics.2024.103810\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Tunnel magnetoresistance (TMR), recognized for its high sensitivity and low power consumption, holds significant promise in the domain of weak magnetic field detection. Using superconducting materials as magnetic concentrators can achieve several hundred to even a thousandfold amplification of magnetic fields, making it one of the most effective approaches to enhance the magnetic field resolution of TMR sensors. This paper utilized the flip-chip bonding process to integrate TMR with the high-temperature superconductor YBCO (YBa2Cu3O7-δ), and successfully developed TMR-YBCO composite magnetic sensor. Building upon this foundation, through optimization of the fabrication process and the pioneering use of a structural design incorporating the filling of annular holes with superconducting concentrators, the sensitivity of the sensor was further enhanced. Finally, the magnetic field resolution was increased by 1030 times compared to TMR sensors, reached to 2.9pT/Hz1/2 at 1 Hz. Simultaneously, results from frequency band testing indicated excellent frequency band characteristics, with a frequency response range exceeding kHz.</p></div>\",\"PeriodicalId\":10812,\"journal\":{\"name\":\"Cryogenics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.8000,\"publicationDate\":\"2024-02-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Cryogenics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0011227524000304\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Cryogenics","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0011227524000304","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
TMR-high-temperature superconductor composite magnetic sensor and its performance optimization
Tunnel magnetoresistance (TMR), recognized for its high sensitivity and low power consumption, holds significant promise in the domain of weak magnetic field detection. Using superconducting materials as magnetic concentrators can achieve several hundred to even a thousandfold amplification of magnetic fields, making it one of the most effective approaches to enhance the magnetic field resolution of TMR sensors. This paper utilized the flip-chip bonding process to integrate TMR with the high-temperature superconductor YBCO (YBa2Cu3O7-δ), and successfully developed TMR-YBCO composite magnetic sensor. Building upon this foundation, through optimization of the fabrication process and the pioneering use of a structural design incorporating the filling of annular holes with superconducting concentrators, the sensitivity of the sensor was further enhanced. Finally, the magnetic field resolution was increased by 1030 times compared to TMR sensors, reached to 2.9pT/Hz1/2 at 1 Hz. Simultaneously, results from frequency band testing indicated excellent frequency band characteristics, with a frequency response range exceeding kHz.
期刊介绍:
Cryogenics is the world''s leading journal focusing on all aspects of cryoengineering and cryogenics. Papers published in Cryogenics cover a wide variety of subjects in low temperature engineering and research. Among the areas covered are:
- Applications of superconductivity: magnets, electronics, devices
- Superconductors and their properties
- Properties of materials: metals, alloys, composites, polymers, insulations
- New applications of cryogenic technology to processes, devices, machinery
- Refrigeration and liquefaction technology
- Thermodynamics
- Fluid properties and fluid mechanics
- Heat transfer
- Thermometry and measurement science
- Cryogenics in medicine
- Cryoelectronics