使用脚本控制聚焦离子束/扫描电子显微镜进行原子探针断层扫描的特定位点自动尖端制备方法。

IF 2.9 4区 工程技术 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Microscopy and Microanalysis Pub Date : 2025-02-03 DOI:10.1093/mam/ozae015
Jun Uzuhashi, Tadakatsu Ohkubo, Kazuhiro Hono
{"title":"使用脚本控制聚焦离子束/扫描电子显微镜进行原子探针断层扫描的特定位点自动尖端制备方法。","authors":"Jun Uzuhashi, Tadakatsu Ohkubo, Kazuhiro Hono","doi":"10.1093/mam/ozae015","DOIUrl":null,"url":null,"abstract":"<p><p>The automation of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam system will certainly contribute to systematic APT research with higher throughput and reliability. While our previous work established a method to prepare tips with a specified tip curvature and taper angle automatically, by using script-controlled FIB/SEM, the technique has been expanded to automated \"site-specific\" tip preparation in the current work. The improved procedure can automatically detect not only the tip shape but also the interface position in the tip; thus, the new function allows for control of the tip apex position. In other words, automated \"site-specific\" tip preparations are possible. The details of the automation procedure and some experimental demonstrations, that is, a Pt cap on Si, InGaN-based MQWs, and a p-n junction of GaAs, are presented.</p>","PeriodicalId":18625,"journal":{"name":"Microscopy and Microanalysis","volume":" ","pages":"1124-1129"},"PeriodicalIF":2.9000,"publicationDate":"2025-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy.\",\"authors\":\"Jun Uzuhashi, Tadakatsu Ohkubo, Kazuhiro Hono\",\"doi\":\"10.1093/mam/ozae015\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>The automation of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam system will certainly contribute to systematic APT research with higher throughput and reliability. While our previous work established a method to prepare tips with a specified tip curvature and taper angle automatically, by using script-controlled FIB/SEM, the technique has been expanded to automated \\\"site-specific\\\" tip preparation in the current work. The improved procedure can automatically detect not only the tip shape but also the interface position in the tip; thus, the new function allows for control of the tip apex position. In other words, automated \\\"site-specific\\\" tip preparations are possible. The details of the automation procedure and some experimental demonstrations, that is, a Pt cap on Si, InGaN-based MQWs, and a p-n junction of GaAs, are presented.</p>\",\"PeriodicalId\":18625,\"journal\":{\"name\":\"Microscopy and Microanalysis\",\"volume\":\" \",\"pages\":\"1124-1129\"},\"PeriodicalIF\":2.9000,\"publicationDate\":\"2025-02-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microscopy and Microanalysis\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1093/mam/ozae015\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microscopy and Microanalysis","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1093/mam/ozae015","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

使用聚焦离子束(FIB)和扫描电子显微镜(SEM)双光束系统进行原子探针断层成像(APT)针尖制备的自动化,必将有助于以更高的产量和可靠性开展系统的 APT 研究。我们之前的工作通过脚本控制 FIB/SEM,建立了一种自动制备具有指定针尖曲率和锥角的针尖的方法,而在当前的工作中,该技术已扩展到自动 "特定部位 "针尖制备。改进后的程序不仅能自动检测针尖形状,还能自动检测针尖中的界面位置;因此,新功能可控制针尖顶点位置。换句话说,自动 "特定部位 "针尖制备成为可能。本文介绍了自动化程序的细节和一些实验演示,即硅上的铂帽、基于 InGaN 的 MQW 和砷化镓的 p-n 结。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy.

The automation of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam system will certainly contribute to systematic APT research with higher throughput and reliability. While our previous work established a method to prepare tips with a specified tip curvature and taper angle automatically, by using script-controlled FIB/SEM, the technique has been expanded to automated "site-specific" tip preparation in the current work. The improved procedure can automatically detect not only the tip shape but also the interface position in the tip; thus, the new function allows for control of the tip apex position. In other words, automated "site-specific" tip preparations are possible. The details of the automation procedure and some experimental demonstrations, that is, a Pt cap on Si, InGaN-based MQWs, and a p-n junction of GaAs, are presented.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Microscopy and Microanalysis
Microscopy and Microanalysis 工程技术-材料科学:综合
CiteScore
1.10
自引率
10.70%
发文量
1391
审稿时长
6 months
期刊介绍: Microscopy and Microanalysis publishes original research papers in the fields of microscopy, imaging, and compositional analysis. This distinguished international forum is intended for microscopists in both biology and materials science. The journal provides significant articles that describe new and existing techniques and instrumentation, as well as the applications of these to the imaging and analysis of microstructure. Microscopy and Microanalysis also includes review articles, letters to the editor, and book reviews.
期刊最新文献
How Cryo-EM Revolutionized the Field of Bioenergetics. Large-Angle Rocking Beam Electron Diffraction of Large Unit Cell Crystals Using Direct Electron Detector. Obtaining 3D Atomic Reconstructions from Electron Microscopy Images Using a Bayesian Genetic Algorithm: Possibilities, Insights, and Limitations. Control of Grain Boundary Formation in Atomically Resolved Nanocrystalline Carbon Monolayers: Dependence on Electron Energy. Cytological Effects of Cadmium Poisoning and the Protective Effect of Quercetin: A Mechanism Exploration based on the Testicular Lamina Propria.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1