利用光干涉非接触测温法提取有机物/半导体界面的界面热阻

IF 2.3 4区 物理与天体物理 Q3 PHYSICS, APPLIED Applied Physics Express Pub Date : 2024-03-06 DOI:10.35848/1882-0786/ad2b01
Jiawen Yu, Hiroaki Hanafusa and Seiichiro Higashi
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引用次数: 0

摘要

我们开发了一种基于光干涉非接触测温法提取有机物/半导体界面热阻(ITR)的实验方法。我们将所提出的技术应用于 SU-8/SiC 双层样品,观察到在脉冲加热和冷却过程中光干涉引起的反射率的明显振荡。将观察到的反射率波形与二维(2D)双层热传导模型和多反射计算的模拟结果拟合后,提取出的 ITR 为 190 mm2 K W-1,这导致界面处的温度下降了 11 K。此外,还获得了样品在整个脉冲加热和冷却过程中的二维瞬态温度分布。
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Extraction of interfacial thermal resistance across an organic/semiconductor interface using optical-interference contactless thermometry
We have developed an experimental method to extract interfacial thermal resistance (ITR) at an organic/semiconductor interface based on optical-interference contactless thermometry. The proposed technique was applied to a SU-8/SiC bilayer sample, and clear oscillations in reflectivity induced by optical interference during pulse heating and cooling were observed. After fitting the observed reflectivity waveform with simulation results by a two-dimensional (2D) double-layer heat conduction model and multi-reflection calculations, ITR was extracted as 190 mm2 K W−1, which resulted in a temperature drop of 11 K at the interface. Moreover, the 2D transient temperature distribution of the sample throughout pulse heating and cooling was obtained.
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来源期刊
Applied Physics Express
Applied Physics Express 物理-物理:应用
CiteScore
4.80
自引率
8.70%
发文量
310
审稿时长
1.2 months
期刊介绍: Applied Physics Express (APEX) is a letters journal devoted solely to rapid dissemination of up-to-date and concise reports on new findings in applied physics. The motto of APEX is high scientific quality and prompt publication. APEX is a sister journal of the Japanese Journal of Applied Physics (JJAP) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
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