掺锌氧化铜薄膜的光学和气体传感性能研究

Sezen Teki̇n
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摘要

采用 SILAR 法在玻璃基底上沉积纯氧化铜薄膜,循环 30 次。为了考察掺杂效应,在与未掺杂薄膜相同的条件下制备了不同掺杂比的掺锌薄膜。为了研究其形态结构,对其进行了 XRD、SEM 和拉曼测量。分析表明,随着掺杂量的增加,聚集和无定形结构也在增加。通过分光光度计测量和相关公式对光学参数进行了表征。经测定,随着锌率的增加,带隙能从 2.50 eV 增加到 2.79 eV。利用 Herve 和 Vandamme、Moss 和 Ravindra 关系确定了折射率。报告了未掺杂和掺杂样品的室温气体感应性能,并计算了氧化铜、1Zn:CuO、3Zn:CuO 和 5Zn:CuO 对 5 ppm 气体的响应,分别为 249%、800%、189% 和 15%。
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Study on the optical and gas-sensing performance of Zn-doped CuO films
The pure copper oxide thin film was deposited on glass substrates by SILAR method with 30 cycles. To examine the doping effect, Zn-doped films at different doping ratios were prepared under the same conditions as the undoped film. The XRD, SEM and Raman measurements were performed to investigate the morphological structure. Analysis showed increasing aggregation and amorphous structure with doping. The optical parameters were characterized by spectrophotometer measurement and relevant formulas. The band gap energies were determined to increase from 2.50 to 2.79 eV with the increasing Zn rate. The Herve and Vandamme, Moss and Ravindra relations were used to determine the refractive index. The room temperature gas-sensing performance for the undoped and doped samples were reported and the responses for 5 ppm gas were calculated for the 5 ppm 249 %, 800 %, 189 % and 15 % for the CuO, 1Zn:CuO, 3Zn:CuO and 5Zn:CuO, respectively.
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