LED 和激光结构的严格过程控制：半导体设备生产中互联计量学的潜力

{"title":"LED 和激光结构的严格过程控制：半导体设备生产中互联计量学的潜力","authors":"Kolja Haberland","doi":"10.1117/12.3001649","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517866,"journal":{"name":"Light-Emitting Devices, Materials, and Applications XXVIII","volume":"74 s318","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Tight process control of LED and laser structures: the potential of connected metrology in semiconductor device production\",\"authors\":\"Kolja Haberland\",\"doi\":\"10.1117/12.3001649\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":517866,\"journal\":{\"name\":\"Light-Emitting Devices, Materials, and Applications XXVIII\",\"volume\":\"74 s318\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Light-Emitting Devices, Materials, and Applications XXVIII\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.3001649\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Light-Emitting Devices, Materials, and Applications XXVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3001649","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}