激光加工过程中的激光诱导击穿光谱在线定量分析

IF 3.7 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Advanced Photonics Research Pub Date : 2024-02-29 DOI:10.1002/adpr.202300293
Tianzhuo Zhao, Qixiu Zhong, Shuzhen Nie, XiaoLong Liu, Hong Xiao, Chenxuan Yin, Fanghui Zhong, Yachen Ke, Fei Li
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引用次数: 0

摘要

等离子体波动、激光烧蚀的不确定性和轫致辐射限制了激光加工过程中的在线元素分析识别,导致难以获得具有足够准确性和可重复性的浓缩结果。为解决这一问题,我们提出了一种具有等离子体空间滤波和光谱筛选功能的激光诱导击穿光谱在线监测系统(LIBS)。在该系统中,利用专门设计的光学傅里叶滤波结构消除了等离子体的高频烧蚀噪声成分,并使用基于等离子体时间波形监测的光谱筛选系统抑制等离子体波动的影响。在没有噪声滤波器或算法优化的情况下,仅根据基本的内标方法,合金样品中所有九种元素的校准曲线的皮尔逊 R2 值在 0.91 至 0.99 之间,平均值为 0.94。相对标准偏差均在 3.5%-8.4% 之间,平均值为 5.4%。准确度和重复性与典型的 LIBS 系统相当。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Laser-Induced Breakdown Spectroscopy Online Quantitative Analysis for Laser Processing

Plasma fluctuations, the uncertainty of laser ablation, and bremsstrahlung limit the identification of online element analysis during laser processing and cause difficulty in achieving concentration results with sufficient accuracy and repeatability. A laser-induced breakdown spectroscopy (LIBS) online monitoring system with plasma spatial filtering and spectral screening is proposed to solve this problem. In this system, the high-frequency ablation noise component of the plasma is eliminated using a specially designed optical Fourier filtering structure, and a spectral screening system based on plasma time waveform monitoring is used to suppress the influence of plasma fluctuations. Without noise filters or algorithm optimizations and based only on the basic internal standard method, the calibration curves of all nine elements in the alloy sample exhibits a Pearson's R2 value ranged from 0.91 to 0.99, with a mean of 0.94. The relative standard deviations are all in the range of 3.5%–8.4% with a mean of 5.4%. The accuracy and repeatability are comparable to those of typical LIBS systems.

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