Tianzhuo Zhao, Qixiu Zhong, Shuzhen Nie, XiaoLong Liu, Hong Xiao, Chenxuan Yin, Fanghui Zhong, Yachen Ke, Fei Li
{"title":"激光加工过程中的激光诱导击穿光谱在线定量分析","authors":"Tianzhuo Zhao, Qixiu Zhong, Shuzhen Nie, XiaoLong Liu, Hong Xiao, Chenxuan Yin, Fanghui Zhong, Yachen Ke, Fei Li","doi":"10.1002/adpr.202300293","DOIUrl":null,"url":null,"abstract":"<p>Plasma fluctuations, the uncertainty of laser ablation, and bremsstrahlung limit the identification of online element analysis during laser processing and cause difficulty in achieving concentration results with sufficient accuracy and repeatability. A laser-induced breakdown spectroscopy (LIBS) online monitoring system with plasma spatial filtering and spectral screening is proposed to solve this problem. In this system, the high-frequency ablation noise component of the plasma is eliminated using a specially designed optical Fourier filtering structure, and a spectral screening system based on plasma time waveform monitoring is used to suppress the influence of plasma fluctuations. Without noise filters or algorithm optimizations and based only on the basic internal standard method, the calibration curves of all nine elements in the alloy sample exhibits a Pearson's <i>R</i><sup>2</sup> value ranged from 0.91 to 0.99, with a mean of 0.94. The relative standard deviations are all in the range of 3.5%–8.4% with a mean of 5.4%. The accuracy and repeatability are comparable to those of typical LIBS systems.</p>","PeriodicalId":7263,"journal":{"name":"Advanced Photonics Research","volume":"5 7","pages":""},"PeriodicalIF":3.7000,"publicationDate":"2024-02-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adpr.202300293","citationCount":"0","resultStr":"{\"title\":\"Laser-Induced Breakdown Spectroscopy Online Quantitative Analysis for Laser Processing\",\"authors\":\"Tianzhuo Zhao, Qixiu Zhong, Shuzhen Nie, XiaoLong Liu, Hong Xiao, Chenxuan Yin, Fanghui Zhong, Yachen Ke, Fei Li\",\"doi\":\"10.1002/adpr.202300293\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Plasma fluctuations, the uncertainty of laser ablation, and bremsstrahlung limit the identification of online element analysis during laser processing and cause difficulty in achieving concentration results with sufficient accuracy and repeatability. A laser-induced breakdown spectroscopy (LIBS) online monitoring system with plasma spatial filtering and spectral screening is proposed to solve this problem. In this system, the high-frequency ablation noise component of the plasma is eliminated using a specially designed optical Fourier filtering structure, and a spectral screening system based on plasma time waveform monitoring is used to suppress the influence of plasma fluctuations. Without noise filters or algorithm optimizations and based only on the basic internal standard method, the calibration curves of all nine elements in the alloy sample exhibits a Pearson's <i>R</i><sup>2</sup> value ranged from 0.91 to 0.99, with a mean of 0.94. The relative standard deviations are all in the range of 3.5%–8.4% with a mean of 5.4%. The accuracy and repeatability are comparable to those of typical LIBS systems.</p>\",\"PeriodicalId\":7263,\"journal\":{\"name\":\"Advanced Photonics Research\",\"volume\":\"5 7\",\"pages\":\"\"},\"PeriodicalIF\":3.7000,\"publicationDate\":\"2024-02-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adpr.202300293\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced Photonics Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/adpr.202300293\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Photonics Research","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/adpr.202300293","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Laser-Induced Breakdown Spectroscopy Online Quantitative Analysis for Laser Processing
Plasma fluctuations, the uncertainty of laser ablation, and bremsstrahlung limit the identification of online element analysis during laser processing and cause difficulty in achieving concentration results with sufficient accuracy and repeatability. A laser-induced breakdown spectroscopy (LIBS) online monitoring system with plasma spatial filtering and spectral screening is proposed to solve this problem. In this system, the high-frequency ablation noise component of the plasma is eliminated using a specially designed optical Fourier filtering structure, and a spectral screening system based on plasma time waveform monitoring is used to suppress the influence of plasma fluctuations. Without noise filters or algorithm optimizations and based only on the basic internal standard method, the calibration curves of all nine elements in the alloy sample exhibits a Pearson's R2 value ranged from 0.91 to 0.99, with a mean of 0.94. The relative standard deviations are all in the range of 3.5%–8.4% with a mean of 5.4%. The accuracy and repeatability are comparable to those of typical LIBS systems.