Jinhyo Park, Seungwook Lee, Jeonggeon Kim, Donggeun Lee
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Capability and efficiency of droplets in removing nanoparticle contaminants from Si wafer via high-speed microdroplet impaction
The high-speed impact of liquid microdroplets has emerged as a promising method to eliminate nanoparticle contaminants from semiconductor wafer surfaces. However, existing experimental studies have...
期刊介绍：
Aerosol Science and Technology publishes theoretical, numerical and experimental investigations papers that advance knowledge of aerosols and facilitate its application. Articles on either basic or applied work are suitable. Examples of topics include instrumentation for the measurement of aerosol physical, optical, chemical and biological properties; aerosol dynamics and transport phenomena; numerical modeling; charging; nucleation; nanoparticles and nanotechnology; lung deposition and health effects; filtration; and aerosol generation.
Consistent with the criteria given above, papers that deal with the atmosphere, climate change, indoor and workplace environments, homeland security, pharmaceutical aerosols, combustion sources, aerosol synthesis reactors, and contamination control in semiconductor manufacturing will be considered. AST normally does not consider papers that describe routine measurements or models for aerosol air quality assessment.
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