关于与大质量体共轭的薄圆板的边界条件

K. B. Ustinov, D. V. Gandilyan
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引用次数: 0

摘要

考虑了与大块基座耦合的圆板在均匀压力作用下的变形问题,而圆板与基座的耦合条件是使用广义弹性嵌入类型的边界条件来模拟的,即通过顺应矩阵来模拟圆板边缘的弯矩和力与位移和旋转角之间的关系。这项工作的主要目标是研究嵌入的弹性对板的弹性响应的影响。该问题的解决方案是根据板的线性理论、近似纵向力均匀性的膜理论以及 Foppl - von Karman 理论(也是近似纵向力均匀性的假设)得出的。使用有限元方法获得了辅助问题的顺应矩阵系数值,并将其与通过分析方法获得的相关问题的系数值进行了比较。针对硅基上的铝晶圆得出了数值结果。所获得的解决方案与所有三种模型在刚性嵌入条件下获得的解决方案进行了比较。结果表明,在大挠度(几个板厚)情况下,考虑嵌入物的顺应性变得至关重要。
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On the boundary conditions for a thin circular plate conjugated to a massive body
The problem of deformation under the action of uniform pressure of a circular plate coupled with a massive base is considered, while the condition for the coupling of the plate with the base is modeled using boundary conditions of the generalized elastic embedding type, i.e. the relationship between the bending moment and forces at the edge of the plate with displacements and rotation angles through the compliance matrix. The main goal of the work is to study the influence of the elasticity of the embedding on the elastic response of the plate. The solution to the problem was obtained in the formulation of the linear theory of plates, the theory of membranes in the approximation of homogeneity of longitudinal forces, and the Foppl — von Karman theory, also in the approximation of the assumption of homogeneity of longitudinal forces. The values of the coefficients of the compliance matrix were obtained using the finite element method for the auxiliary problem and compared with the values of the coefficients obtained for related problems by analytical methods. Numerical results were obtained for an aluminum wafer on a silicon base. The obtained solution was compared with the solution obtained for the rigid embedment condition for all three models used. It is shown that in the case of large deflections (several plate thicknesses), taking into account the compliance of the embedment becomes essential.
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