射频电压幅值对α-γ模式射频-低频介质势垒放电的空间和时间分辨特性的影响

Raphaël Robert, Nader Sadeghi, Gerjan J M Hagelaar, L. Stafford, Françoise Massines
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引用次数: 1

摘要

本研究报告了对表现出 α - γ 转变的氩-NH3 双频介质势垒放电(DBD)进行实验和建模研究的结果。空间和时间分辨光学吸收和发射光谱相结合,记录了氩气瞬变数密度、氩气 750.4 nm 线发射强度和电子-氩气轫致辐射连续发射强度的时空映射。随着 50 kHz-5 MHz DBD 中射频电压振幅的增加,在 γ 模式中观察到的氩激发态(1s 和 2p态,与高能电子群相关)的最大数量减少,并在低频周期中提前出现。另一方面,从连续发射强度监测到的大体积电子密度增加了,在射频-α 模式中比在γ 模式中上升得更明显。这种行为与一维流体模型的预测一致,是由于γ击穿时阴极鞘自我维持所需的气体电压降低所致。
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Influence of the RF voltage amplitude on the space- and time-resolved properties of RF-LF dielectric barrier discharges in α-γ mode
This work reports the results of an experimental and modelling study on dual-frequency Ar-NH3 dielectric barrier discharges (DBD) exhibiting the α – γ transition. A combination of space- and time-resolved optical absorption and emission spectroscopy is used to record spatio-temporal mappings of the Ar metastable number density, Ar 750.4 nm line emission intensity, and electron-Ar Bremsstrahlung continuum emission intensity. With the increase of the RF voltage amplitude in a 50 kHz-5 MHz DBD, maximum populations of Ar excited species (1s and 2p states, linked to the population of high-energy electrons) observed in the γ mode decrease and appear earlier in the low-frequency cycle. On the other hand, the density of the bulk electrons, monitored from the continuum emission intensity, increases, with a more prominent rise in the RF-α mode than in the γ regime. Such behaviors are consistent with the predictions of 1D fluid model and results from a decrease of the gas voltage required for self-maintenance of the cathode sheath in the γ breakdown.
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