Matthias Castor Karel Albrechts, Ivan Tsonev, A. Bogaerts
{"title":"研究 O2 等离子体中的 O 原子动力学及其余辉","authors":"Matthias Castor Karel Albrechts, Ivan Tsonev, A. Bogaerts","doi":"10.1088/1361-6595/ad3f4a","DOIUrl":null,"url":null,"abstract":"\n We have developed a comprehensive kinetic model to study the O atom kinetics in an O2 plasma and its afterglow. By adopting a pseudo-1D plug-flow formalism within the kinetic model, our aim is to assess how far the O atoms travel in the plasma afterglow, evaluating its potential as a source of O atoms for post-plasma gas conversion applications. Since we could not find experimental data for pure O2 plasma at atmospheric pressure, we first validated our model at low pressure (1-10 Torr) where very good experimental data are available. Good agreement between our model and experiments was achieved for the reduced electric field, gas temperature and the densities of the dominant neutral species, i.e. O2(a), O2(b) and O. Subsequently, we confirmed that the chemistry set is consistent with thermodynamic equilibrium calculations at atmospheric pressure. Finally, we investigated the O atom densities in the O2 plasma and its afterglow, for which we considered a microwave O2 plasma torch, operating at a pressure between 0.1 and 1 atm, for a flow rate of 20 slm and an SEI of 1656 kJ/mol. Our results show that for both pressure conditions, a high dissociation degree of ca. 92 % is reached within the discharge. However, the O atoms travel much further in the plasma afterglow for p = 0.1 atm (9.7 cm) than for p = 1 atm (1.4 cm), attributed to the longer lifetime (3.8 ms at 0.1 atm vs 1.8 ms at 1 atm) resulting from slower three-body recombination kinetics, as well as a higher volumetric flow rate.","PeriodicalId":508056,"journal":{"name":"Plasma Sources Science and Technology","volume":"10 18","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of O atom kinetics in O2 plasma and its afterglow\",\"authors\":\"Matthias Castor Karel Albrechts, Ivan Tsonev, A. Bogaerts\",\"doi\":\"10.1088/1361-6595/ad3f4a\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n We have developed a comprehensive kinetic model to study the O atom kinetics in an O2 plasma and its afterglow. By adopting a pseudo-1D plug-flow formalism within the kinetic model, our aim is to assess how far the O atoms travel in the plasma afterglow, evaluating its potential as a source of O atoms for post-plasma gas conversion applications. Since we could not find experimental data for pure O2 plasma at atmospheric pressure, we first validated our model at low pressure (1-10 Torr) where very good experimental data are available. Good agreement between our model and experiments was achieved for the reduced electric field, gas temperature and the densities of the dominant neutral species, i.e. O2(a), O2(b) and O. Subsequently, we confirmed that the chemistry set is consistent with thermodynamic equilibrium calculations at atmospheric pressure. Finally, we investigated the O atom densities in the O2 plasma and its afterglow, for which we considered a microwave O2 plasma torch, operating at a pressure between 0.1 and 1 atm, for a flow rate of 20 slm and an SEI of 1656 kJ/mol. Our results show that for both pressure conditions, a high dissociation degree of ca. 92 % is reached within the discharge. However, the O atoms travel much further in the plasma afterglow for p = 0.1 atm (9.7 cm) than for p = 1 atm (1.4 cm), attributed to the longer lifetime (3.8 ms at 0.1 atm vs 1.8 ms at 1 atm) resulting from slower three-body recombination kinetics, as well as a higher volumetric flow rate.\",\"PeriodicalId\":508056,\"journal\":{\"name\":\"Plasma Sources Science and Technology\",\"volume\":\"10 18\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasma Sources Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6595/ad3f4a\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasma Sources Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6595/ad3f4a","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
我们建立了一个综合动力学模型来研究 O2 等离子体及其余辉中的 O 原子动力学。通过在动力学模型中采用伪一维塞流形式主义,我们的目的是评估 O 原子在等离子体余辉中的移动距离,从而评估其作为等离子体后气体转换应用的 O 原子源的潜力。由于我们无法找到大气压下纯 O2 等离子体的实验数据,因此我们首先在低压(1-10 托)下验证了我们的模型,因为在低压下可以获得非常好的实验数据。在降低电场、气体温度和主要中性物种(即 O2(a)、O2(b) 和 O 的密度方面,我们的模型与实验之间取得了良好的一致性。最后,我们研究了 O2 等离子体及其余辉中的 O 原子密度,为此我们考虑了微波 O2 等离子体炬,其工作压力介于 0.1 和 1 atm 之间,流速为 20 slm,SEI 为 1656 kJ/mol。我们的研究结果表明,在这两种压力条件下,放电过程中的解离度都高达约 92%。然而,在 p = 0.1 atm(9.7 厘米)时,O 原子在等离子体余辉中的移动距离比 p = 1 atm(1.4 厘米)时要远得多,这是因为三体重组动力学速度较慢以及容积流速较高,导致 O 原子的寿命较长(0.1 atm 时为 3.8 毫秒,1 atm 时为 1.8 毫秒)。
Investigation of O atom kinetics in O2 plasma and its afterglow
We have developed a comprehensive kinetic model to study the O atom kinetics in an O2 plasma and its afterglow. By adopting a pseudo-1D plug-flow formalism within the kinetic model, our aim is to assess how far the O atoms travel in the plasma afterglow, evaluating its potential as a source of O atoms for post-plasma gas conversion applications. Since we could not find experimental data for pure O2 plasma at atmospheric pressure, we first validated our model at low pressure (1-10 Torr) where very good experimental data are available. Good agreement between our model and experiments was achieved for the reduced electric field, gas temperature and the densities of the dominant neutral species, i.e. O2(a), O2(b) and O. Subsequently, we confirmed that the chemistry set is consistent with thermodynamic equilibrium calculations at atmospheric pressure. Finally, we investigated the O atom densities in the O2 plasma and its afterglow, for which we considered a microwave O2 plasma torch, operating at a pressure between 0.1 and 1 atm, for a flow rate of 20 slm and an SEI of 1656 kJ/mol. Our results show that for both pressure conditions, a high dissociation degree of ca. 92 % is reached within the discharge. However, the O atoms travel much further in the plasma afterglow for p = 0.1 atm (9.7 cm) than for p = 1 atm (1.4 cm), attributed to the longer lifetime (3.8 ms at 0.1 atm vs 1.8 ms at 1 atm) resulting from slower three-body recombination kinetics, as well as a higher volumetric flow rate.