靶材料对双电极介质势垒氦等离子体射流电气特性的影响

N. Škoro, K. Kutasi, Marija Puač, Z. L. Petrović, N. Puač
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摘要

本文介绍了以 He(2 slm 和 3 slm)为工作气体、与铜、PET 和蒸馏水靶相互作用的介质阻挡放电(DBD)等离子体射流的电学特性。我们使用的等离子体射流带有两个包裹在玻璃管周围的铜电极。一个电极由 30 kHz 的高压正弦信号供电,而另一个电极和靶架接地。我们对电压和电流波形、相位差、电压-电流(V-I)特性、计算阻抗和功率沉积进行了详细研究。目的是确定不同靶材料及其电导率对等离子特性的影响。我们计算了总谐波失真(THD)因子,结果表明,通过接地电极的电流取决于靶材的电导率。我们还计算了输送到等离子体核心和等离子体羽流区域的功率,并观察到目标电导率的变化会影响这两个等离子体区域的功率。实验表征的电路由等效电路模型模拟,该模型对应于等离子体关闭和等离子体开启状态。还添加了电压控制电流源,作为等离子体开启状态下形成的流束模型。
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Effect of target material on electrical properties of a two-electrode dielectric barrier helium plasma jet
In this paper we present electrical characterization of a dielectric barrier discharge (DBD) plasma jet operating with He (2 slm and 3 slm) as working gas and interacting with Cu, PET and distilled H2O targets. We used a plasma jet with two copper electrodes wrapped around a glass tube. One electrode was powered by a high-voltage sinusoidal signal of 30 kHz, whereas the other electrode and the target holder were grounded. We have performed detailed investigation of the voltage and current waveforms, phase differences, volt-current (V-I) characteristics, calculated impedances and power deposition. The aim was to determine the influence of different target materials and their conductivity on the plasma properties. We calculated the total harmonic distortion (THD) factor that showed that the current through grounded electrode depends on the conductivity of the target. We also calculated the power delivered to the plasma core and the plasma plume regions and observed that the change in the target conductance influenced the power in both plasma regions. The experimentally characterized electrical circuit was simulated by a model of equivalent electrical circuit corresponding to the plasma-off and plasma-on regime. Voltage controlled current source was added as model of a streamer formed in plasma-on regime.
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