利用高介电材料设计基于五碳烯薄膜晶体管的高灵敏度氢气传感器

Yogesh Thakur, Balwinder Raj, B. Raj
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摘要

在顶栅顶触点(TGTC)几何结构中模拟了有机场效应晶体管的电气特性,并根据该结构设计了提高灵敏度的氢气传感器。必须解决与氢气使用有关的安全问题;这些危险特性包括:可燃范围广(4-75%),导致燃烧速度快;最小点火能量低(0.017 mJ);燃烧热高(143 kJ/g);氢气扩散率高(在空气中为 0.61 cm2/s)。这些特点使得氢气燃烧无法控制在特定时间后进行。所有模拟均在 Silvaco TCAD ATLAS 工具中进行。我们分析了气体传感器的驱动原理,并介绍了使用铂金属作为栅极电极的 OFET 在检测 H2 气体时的气体传感特性。IOFF、ION 和 VTH 是灵敏度参数,当栅极的金属功能随栅极上存在的气体发生变化时,这些参数也会发生变化。针对不同的电介质材料对所设计的传感器进行了分析。结果表明,当绝缘层的介电值从二氧化硅(3.9)增加到氧化镧(27),铂栅电极的功函数分别变化 50、100、150 和 200 meV 时,基于 OFET 的 H2 传感器的灵敏度分别增加 73.4%、80.7%、90.5% 和 95.6%。结果与基于 In1-xGaxAs CGNWFET 的 H2 传感器进行了比较,当功函数在 200 meV 变化时,基于 OFET 的 H2 传感器的灵敏度提高了 8.09%。
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Design of Pentacene Thin-Film Transistor Based Hydrogen Gas Sensor with High-K Dielectric Materials for High Sensitivity
Electrical properties of an organic field-effect transistor were modelled in top gate top contact (TGTC) geometry and H2 gas sensors were designed for increased sensitivity based on the structure. Safety concerns related to hydrogen usage must be addressed; these hazardous characteristics include a wide flammable range (4-75%) that results in a rapid burning velocity, a low minimum ignition energy (0.017 mJ), a high heat of combustion (143 kJ/g), and the high diffusivity of hydrogen gas (0.61 cm2/s in the air). These characteristics make it impossible to control hydrogen combustion after a specific time. All simulations were performed in the Silvaco TCAD ATLAS tool. We analysed the driving principle of gas sensors and introduced gas sensing properties in OFET using platinum metal at the gate electrode for H2 gas detection. IOFF, ION, and VTH are sensitivity parameters that alter when the metalwork function of the gate changes with respect to the gas present on it. The designed sensor was analysed for different dielectric materials. Results demonstrate that the increase in sensitivity for OFET-based H2 sensors is 73.4 %, 80.7%, 90.5 %, and 95.6 % when the work function changes by 50, 100, 150, and 200 meV for Pt gate electrodes with an increase in dielectric value of insulating layer from SiO2 (3.9) to La2O3 (27). Results were compared with the In1-xGaxAs CGNWFET-based H2 sensor as the work function varies at 200 meV,the sensitivity enhancement with OFET-based H2 sensors is 8.09%
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