辐照对 Mo 和 Ta 薄膜晶粒尺寸和纹理的影响

IF 0.5 Q4 PHYSICS, CONDENSED MATTER Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2024-05-07 DOI:10.1134/s1027451024020034

V. A. Andrianov, K. A. Bedelbekova

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引用次数: 0

摘要

摘要在金属基体中植入重离子会产生高浓度的辐射缺陷。对植入 57Fe 离子的 Mo 和 Ta 箔进行了 X 射线衍射研究。研究表明，铁离子的植入不会对晶格参数产生重大影响。辐照会导致衍射线变宽，晶粒尺寸减小。研究发现，Mo 和 Ta 箔具有高度纹理，在箔面具有{100}取向。用铁离子照射对纹理没有明显影响。然而，随后在 700°С 温度下进行退火会削弱钼箔和钽箔辐照面的纹理，但不会影响非辐照面的纹理。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Effect of Irradiation on Grain Size and Texture in Mo and Ta Films

Abstract

Implantation of heavy ions into metal matrices leads to the creation of a high concentration of radiation defects. X-ray diffraction studies of Mo and Ta foils implanted with ⁵⁷Fe ions have been carried out. It is shown that the implantation of Fe ions does not significantly affect the lattice parameters. It has been established that irradiation leads to the broadening of diffraction lines and a decrease in the size of crystal grains. The Mo and Ta foils are found to be highly textured, with {100} orientation in the foil plane. Irradiation with Fe ions has no noticeable effect on the texture. However, subsequent annealing at a temperature of 700°С weakens the texture on the irradiated side for Mo and Ta foils without affecting the texture of the nonirradiated side.

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.