Sherina Harilal, Sumesh Sadhujan, Kefan Zhang, Awad Shalabny, Francesco Buonocore, Barbara Ferrucci, Simone Giusepponi, Massimo Celino, Muhammad Y. Bashouti
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引用次数: 0
摘要
通过氢原子(也称为 Si-H)终止硅的表面偶极键可以实现化学钝化,减少电子带隙中的表面态,从而改变电子特性。通过对掺杂水平(1014-1020 cm-3)和类型(n 和 p)的全面研究,我们发现了 Si-H 终止诱导的一致的表面偶极趋势。它是通过重新分配表面电荷并与化学键建立热平衡来实现的。为了解决这个问题,我们采用开尔文探针、X 射线光电子能谱和光电子产率光谱等方法测量了表面功函数、表面电子亲和力以及价带和费米级之间的能差。这些发现通过 ab initio 模拟得到了进一步验证。这一发现不仅对消除半导体界面上的电子缺陷(这在微电子学中至关重要)具有重大意义,而且对开发和设计具有可控电子特性的混合界面和异质结也具有重大意义。
Uniform Tendency of Surface Dipoles Across Silicon Doping Levels and Types of H-Terminated Surfaces
The termination of surface-dangling bonds on silicon through hydrogen atoms, also known as Si–H, can achieve chemical passivation and reduce surface states in the electronic bandgap, thus altering electronic properties. Through a comprehensive study of doping levels (1014–1020 cm−3) and types (n and p), a consistent surface dipole trend induced by Si–H termination is discovered. It is achieved by redistributing surface charges and establishing thermal equilibrium with the chemical bond. To resolve this, the surface work function, surface electron affinity, and the energy difference between the valence band and the Fermi level are measured by employing the Kelvin probe, X-ray photoelectron spectroscopy, and photoelectron yield spectroscopy methods. These findings are further validated through ab initio simulations. This finding has immense implications not only for eliminating electronic defects at semiconductor interfaces, which is crucial in microelectronics but also for developing and engineering hybrid interfaces and heterojunctions with controlled electronic properties.
期刊介绍:
Advanced Electronic Materials is an interdisciplinary forum for peer-reviewed, high-quality, high-impact research in the fields of materials science, physics, and engineering of electronic and magnetic materials. It includes research on physics and physical properties of electronic and magnetic materials, spintronics, electronics, device physics and engineering, micro- and nano-electromechanical systems, and organic electronics, in addition to fundamental research.