{"title":"磁场辅助脉冲激光沉积制备的柱状 BiFeO3 厚膜的表征","authors":"J. M. Park, M. Okuyama","doi":"10.35848/1347-4065/ad3ab9","DOIUrl":null,"url":null,"abstract":"Polycrystalline BiFeO<sub>3</sub> thick films were prepared on Pt/TiO<sub>2</sub>/SiO<sub>2</sub>/Si substates by using magnetic field-assisted pulsed laser deposition. Columnar BiFeO<sub>3</sub> thick films were successfully obtained with a thickness of 1.8 <italic toggle=\"yes\">μ</italic>m, owing to an oblique incoming flux and high deposition rate by the confinement of the plume under a magnetic field. In the columnar BiFeO<sub>3</sub> thick films, a saturated <italic toggle=\"yes\">P-E</italic> hysteresis loop was obtained at RT, and the remanent polarization (<italic toggle=\"yes\">P</italic>\n<sub>\n<italic toggle=\"yes\">r</italic>\n</sub>) and coercive field (<italic toggle=\"yes\">E</italic>\n<sub>\n<italic toggle=\"yes\">c</italic>\n</sub>) were 42 <italic toggle=\"yes\">μ</italic>C cm<sup>−2</sup> and 380 kV cm<sup>−1</sup>, respectively. Also, the piezoelectric response measured by atomic force microscopy showed a butterfly-shaped curve, and the piezoelectric <italic toggle=\"yes\">d</italic>\n<sub>33</sub> coefficient was about 50 pm V<sup>−1</sup>.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":null,"pages":null},"PeriodicalIF":1.5000,"publicationDate":"2024-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characterization of columnar BiFeO3 thick films prepared by magnetic field-assisted pulsed laser deposition\",\"authors\":\"J. M. Park, M. Okuyama\",\"doi\":\"10.35848/1347-4065/ad3ab9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Polycrystalline BiFeO<sub>3</sub> thick films were prepared on Pt/TiO<sub>2</sub>/SiO<sub>2</sub>/Si substates by using magnetic field-assisted pulsed laser deposition. Columnar BiFeO<sub>3</sub> thick films were successfully obtained with a thickness of 1.8 <italic toggle=\\\"yes\\\">μ</italic>m, owing to an oblique incoming flux and high deposition rate by the confinement of the plume under a magnetic field. In the columnar BiFeO<sub>3</sub> thick films, a saturated <italic toggle=\\\"yes\\\">P-E</italic> hysteresis loop was obtained at RT, and the remanent polarization (<italic toggle=\\\"yes\\\">P</italic>\\n<sub>\\n<italic toggle=\\\"yes\\\">r</italic>\\n</sub>) and coercive field (<italic toggle=\\\"yes\\\">E</italic>\\n<sub>\\n<italic toggle=\\\"yes\\\">c</italic>\\n</sub>) were 42 <italic toggle=\\\"yes\\\">μ</italic>C cm<sup>−2</sup> and 380 kV cm<sup>−1</sup>, respectively. Also, the piezoelectric response measured by atomic force microscopy showed a butterfly-shaped curve, and the piezoelectric <italic toggle=\\\"yes\\\">d</italic>\\n<sub>33</sub> coefficient was about 50 pm V<sup>−1</sup>.\",\"PeriodicalId\":14741,\"journal\":{\"name\":\"Japanese Journal of Applied Physics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2024-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Japanese Journal of Applied Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.35848/1347-4065/ad3ab9\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad3ab9","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Characterization of columnar BiFeO3 thick films prepared by magnetic field-assisted pulsed laser deposition
Polycrystalline BiFeO3 thick films were prepared on Pt/TiO2/SiO2/Si substates by using magnetic field-assisted pulsed laser deposition. Columnar BiFeO3 thick films were successfully obtained with a thickness of 1.8 μm, owing to an oblique incoming flux and high deposition rate by the confinement of the plume under a magnetic field. In the columnar BiFeO3 thick films, a saturated P-E hysteresis loop was obtained at RT, and the remanent polarization (Pr) and coercive field (Ec) were 42 μC cm−2 and 380 kV cm−1, respectively. Also, the piezoelectric response measured by atomic force microscopy showed a butterfly-shaped curve, and the piezoelectric d33 coefficient was about 50 pm V−1.
期刊介绍：
The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields:
• Semiconductors, dielectrics, and organic materials
• Photonics, quantum electronics, optics, and spectroscopy
• Spintronics, superconductivity, and strongly correlated materials
• Device physics including quantum information processing
• Physics-based circuits and systems
• Nanoscale science and technology
• Crystal growth, surfaces, interfaces, thin films, and bulk materials
• Plasmas, applied atomic and molecular physics, and applied nuclear physics
• Device processing, fabrication and measurement technologies, and instrumentation
• Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS
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