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Fabrication of polarity inverted LiNbO3/GaN channel waveguide by surface activated bonding for high-efficiency transverse quasi-phase-matched wavelength conversion 表面激活键合制备极性反转LiNbO3/GaN通道波导,用于高效横向准相位匹配波长转换
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-08 DOI: 10.35848/1347-4065/acf823
Ryosuke Noro, Mariko Adachi, Yasufumi Fujiwara, M. Uemukai, T. Tanikawa, R. Katayama
GaN is an attractive material for integrating optical quantum devices. Adding a large optical nonlinearity of MgO doped congruent LiNbO3 (MgO:CLN) to GaN will improve the efficiency of quantum light sources. In this work, we proposed transverse quasi-phase-matched wavelength conversion devices with waveguide core materials of MgO:CLN and GaN. The waveguide core is formed by an adhesion-free surface activated bonding (SAB). A high thin film transfer yield was achieved with a high bonding strength of 4 MPa by optimizing the bonding conditions and reducing the surface roughness of the GaN film to be 0.5 nm in a 100 × 100 μm2 area using chemical mechanical polishing. The MgO:CLN/GaN waveguide structure was successfully fabricated by MgO:CLN thin film transfer, lift-off and dry etching processes. This MgO:CLN/GaN adhesion-free SAB technique is expected to be applied to various devices, such as optical devices and electronic devices, to enhance their functionality.
GaN是一种用于集成光量子器件的有吸引力的材料。在GaN中添加掺杂MgO的全等LiNbO3(MgO:CLN)的大的光学非线性将提高量子光源的效率。在这项工作中,我们提出了波导核心材料为MgO:CLN和GaN的横向准相位匹配波长转换器件。波导芯通过无粘附表面活性结合(SAB)形成。通过优化接合条件并使用化学机械抛光将GaN膜的表面粗糙度在100×100μm2区域内降低到0.5nm,获得了高薄膜转移产率和4MPa的高接合强度。采用MgO:CLN薄膜转移、剥离和干法刻蚀工艺成功制备了MgO:CLN/GaN波导结构。这种MgO:CLN/GaN无粘附SAB技术有望应用于各种器件,如光学器件和电子器件,以增强其功能。
{"title":"Fabrication of polarity inverted LiNbO3/GaN channel waveguide by surface activated bonding for high-efficiency transverse quasi-phase-matched wavelength conversion","authors":"Ryosuke Noro, Mariko Adachi, Yasufumi Fujiwara, M. Uemukai, T. Tanikawa, R. Katayama","doi":"10.35848/1347-4065/acf823","DOIUrl":"https://doi.org/10.35848/1347-4065/acf823","url":null,"abstract":"GaN is an attractive material for integrating optical quantum devices. Adding a large optical nonlinearity of MgO doped congruent LiNbO3 (MgO:CLN) to GaN will improve the efficiency of quantum light sources. In this work, we proposed transverse quasi-phase-matched wavelength conversion devices with waveguide core materials of MgO:CLN and GaN. The waveguide core is formed by an adhesion-free surface activated bonding (SAB). A high thin film transfer yield was achieved with a high bonding strength of 4 MPa by optimizing the bonding conditions and reducing the surface roughness of the GaN film to be 0.5 nm in a 100 × 100 μm2 area using chemical mechanical polishing. The MgO:CLN/GaN waveguide structure was successfully fabricated by MgO:CLN thin film transfer, lift-off and dry etching processes. This MgO:CLN/GaN adhesion-free SAB technique is expected to be applied to various devices, such as optical devices and electronic devices, to enhance their functionality.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49232816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reducing GaN crystal dislocations through lateral growth on uneven seed crystal surfaces using the Na-flux method 利用na通量法通过在不均匀的种子晶体表面上横向生长来减少GaN晶体位错
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-07 DOI: 10.35848/1347-4065/acf7a0
Shogo Washida, Masayuki Imanishi, Ricksen Tandryo, Kazuma Hamada, K. Murakami, S. Usami, M. Maruyama, M. Yoshimura, Yusuke Mori
In recent years, we have achieved low threading dislocation density in GaN wafers by using the Na-flux multi-point seed technique. However, the resulting wafers exhibit regions of high dislocation density, exceeding 105 cm-2 at the coalescence boundary where pyramidal crystals merge. In this study, we discovered that annealing seed crystals at 900°C generated an uneven surface with approximately 50 µm of GaN decomposition, and growing GaN on the thus-generated uneven surfaces induced lateral growth composed of facets. We then investigated the effect of the uneven surface on dislocation reduction and found that the average threading dislocation density of the grown crystal was reduced from 9.7×105 cm-2 in the seed crystal to 1.2×105 cm-2. We confirmed that the reduction in threading dislocation density was due to the termination of dislocations by means of inclusions, and to mergers or annihilation as they encountered one another during facet growth.
近年来,我们利用Na-flux多点种子技术在GaN晶圆中实现了低螺纹位错密度。然而,所得到的晶圆显示出高位错密度区域,在锥体晶体合并的聚结边界超过105 cm-2。在本研究中,我们发现在900°C下退火种子晶体会产生一个不均匀的表面,大约有50µm的GaN分解,而在这样产生的不均匀表面上生长GaN会诱导由facet组成的横向生长。然后,我们研究了不均匀表面对位错还原的影响,发现生长晶体的平均螺纹位错密度从种子晶体中的9.7×105 cm-2降低到1.2×105 cm-2。我们证实,螺纹位错密度的降低是由于位错通过夹杂的方式终止,以及它们在小面生长过程中遇到的合并或湮灭。
{"title":"Reducing GaN crystal dislocations through lateral growth on uneven seed crystal surfaces using the Na-flux method","authors":"Shogo Washida, Masayuki Imanishi, Ricksen Tandryo, Kazuma Hamada, K. Murakami, S. Usami, M. Maruyama, M. Yoshimura, Yusuke Mori","doi":"10.35848/1347-4065/acf7a0","DOIUrl":"https://doi.org/10.35848/1347-4065/acf7a0","url":null,"abstract":"\u0000 In recent years, we have achieved low threading dislocation density in GaN wafers by using the Na-flux multi-point seed technique. However, the resulting wafers exhibit regions of high dislocation density, exceeding 105 cm-2 at the coalescence boundary where pyramidal crystals merge. In this study, we discovered that annealing seed crystals at 900°C generated an uneven surface with approximately 50 µm of GaN decomposition, and growing GaN on the thus-generated uneven surfaces induced lateral growth composed of facets. We then investigated the effect of the uneven surface on dislocation reduction and found that the average threading dislocation density of the grown crystal was reduced from 9.7×105 cm-2 in the seed crystal to 1.2×105 cm-2. We confirmed that the reduction in threading dislocation density was due to the termination of dislocations by means of inclusions, and to mergers or annihilation as they encountered one another during facet growth.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46326059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spin-wave enhancement using feedback-ring structure 利用反馈环结构增强自旋波
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-07 DOI: 10.35848/1347-4065/acf79d
Masashi Iwaba, Koji Sekiguchi
Magnonic mode interconversion has paved the way for the integration of various developed magnonic functionalities, such as logic gates, switches, and multiplexers; however, it is limited by intrinsic magnetic damping. Therefore, this study proposes a potential amplification method to integrate spin-waves into magnonic circuits. The phase-matching conditions were tuned by introducing a feedback-ring structure. The results of microfocused Brillouin light scattering spectroscopy and micromagnetic simulations demonstrate the effectiveness of the spin-wave enhancement of feedback-ring structure. Consequently, spin-wave enhancement preserving phase information can be developed to realize integrated magnonic circuits.
磁振子模式互转换为集成各种已开发的磁振子功能(如逻辑门、开关和多路复用器)铺平了道路;然而,它受到固有磁阻尼的限制。因此,本研究提出了一种将自旋波集成到磁电路中的电位放大方法。通过引入反馈环结构对相位匹配条件进行了调整。微聚焦布里渊光散射光谱和微磁模拟结果证明了自旋波增强反馈环结构的有效性。因此,可以利用自旋波增强保持相位信息来实现集成磁电路。
{"title":"Spin-wave enhancement using feedback-ring structure","authors":"Masashi Iwaba, Koji Sekiguchi","doi":"10.35848/1347-4065/acf79d","DOIUrl":"https://doi.org/10.35848/1347-4065/acf79d","url":null,"abstract":"Magnonic mode interconversion has paved the way for the integration of various developed magnonic functionalities, such as logic gates, switches, and multiplexers; however, it is limited by intrinsic magnetic damping. Therefore, this study proposes a potential amplification method to integrate spin-waves into magnonic circuits. The phase-matching conditions were tuned by introducing a feedback-ring structure. The results of microfocused Brillouin light scattering spectroscopy and micromagnetic simulations demonstrate the effectiveness of the spin-wave enhancement of feedback-ring structure. Consequently, spin-wave enhancement preserving phase information can be developed to realize integrated magnonic circuits.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43858063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanical robust paper-based triboelectric nanogenerator films 机械坚固的纸基摩擦电纳米发电机薄膜
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-07 DOI: 10.35848/1347-4065/acf79e
Takashi Ikuno, Ryuto Takita, Rintarou Nagasawa, Kohei Hara, Qingyang Zhou
We have fabricated paper-based triboelectric nanogenerator (TENG) films that are composed of polydimethylsiloxane (PDMS) and copy paper. The Young’s modulus of the paper-based TENG film was approximately 807 MPa, which was 1500 times higher than that of the pure PDMS film with the same thickness. The output voltage of the TENG with the paper/PDMS film was comparable to that of the PDMS film. The maximum power density of the TENGs with the paper/PDMS film was 181 μW cm−2. Furthermore, we demonstrated luminescence of 54 LEDs using the TENG with the paper/PDMS film.
我们制备了由聚二甲基硅氧烷(PDMS)和复印纸组成的纸基摩擦电纳米发电机(TENG)薄膜。纸基TENG膜的杨氏模量约为807MPa,是具有相同厚度的纯PDMS膜的杨氏模数的1500倍。具有纸/PDMS膜的TENG的输出电压与PDMS膜的输出电压相当。纸/PDMS薄膜的Teng最大功率密度为181μW cm−2。此外,我们使用TENG和纸/PDMS膜演示了54个LED的发光。
{"title":"Mechanical robust paper-based triboelectric nanogenerator films","authors":"Takashi Ikuno, Ryuto Takita, Rintarou Nagasawa, Kohei Hara, Qingyang Zhou","doi":"10.35848/1347-4065/acf79e","DOIUrl":"https://doi.org/10.35848/1347-4065/acf79e","url":null,"abstract":"We have fabricated paper-based triboelectric nanogenerator (TENG) films that are composed of polydimethylsiloxane (PDMS) and copy paper. The Young’s modulus of the paper-based TENG film was approximately 807 MPa, which was 1500 times higher than that of the pure PDMS film with the same thickness. The output voltage of the TENG with the paper/PDMS film was comparable to that of the PDMS film. The maximum power density of the TENGs with the paper/PDMS film was 181 μW cm−2. Furthermore, we demonstrated luminescence of 54 LEDs using the TENG with the paper/PDMS film.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44178546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Visualizing the inside of three-dimensional self-organizing systems by three-dimensional atomic force microscopy 用三维原子力显微镜观察三维自组织系统的内部
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-06 DOI: 10.35848/1347-4065/acf721
Takeshi Fukuma
The development of three-dimensional atomic force microscopy (3D-AFM) enabled the direct visualization of 3D hydration structures at solid-liquid interfaces with subnanometer resolution. Such imaging is possible because the hydration structure, once disorganized by the tip scan, can recover its original state through self-organization. Based on the same concept, the interior of any 3D self-organizing systems (3D-SOSs) may be visualized by 3D-AFM. To pursue this possibility, we have explored 3D-AFM imaging of various 3D-SOSs in interface sciences, life sciences and electrochemistry. Here, we review our recent progress in such 3D-AFM studies on 3D-SOSs, including hydration structures on cellulose nanocrystals, adsorption structures of anti-freezing surfactants on sapphire (0001) surfaces, intra-cellular components inside living cells, and charges accumulated inside an electric double layer. These examples demonstrate the effectiveness of 3D-AFM for understanding the nanoscale structures, properties and functions of various 3D-SOSs.
三维原子力显微镜(3D- afm)的发展使得在亚纳米分辨率的固液界面上直接可视化三维水化结构成为可能。这种成像是可能的,因为水化结构一旦被尖端扫描打乱,就可以通过自组织恢复其原始状态。基于相同的概念,任何3D自组织系统(3D- sos)的内部都可以通过3D- afm进行可视化。为了实现这种可能性,我们探索了界面科学、生命科学和电化学领域各种3D-SOSs的3D-AFM成像。在这里,我们回顾了3D-AFM在3D-SOSs研究方面的最新进展,包括纤维素纳米晶体的水化结构、蓝宝石(0001)表面抗冻表面活性剂的吸附结构、活细胞内的细胞内成分以及双电层内积累的电荷。这些例子证明了3D-AFM在理解各种3D-SOSs的纳米级结构、性质和功能方面的有效性。
{"title":"Visualizing the inside of three-dimensional self-organizing systems by three-dimensional atomic force microscopy","authors":"Takeshi Fukuma","doi":"10.35848/1347-4065/acf721","DOIUrl":"https://doi.org/10.35848/1347-4065/acf721","url":null,"abstract":"The development of three-dimensional atomic force microscopy (3D-AFM) enabled the direct visualization of 3D hydration structures at solid-liquid interfaces with subnanometer resolution. Such imaging is possible because the hydration structure, once disorganized by the tip scan, can recover its original state through self-organization. Based on the same concept, the interior of any 3D self-organizing systems (3D-SOSs) may be visualized by 3D-AFM. To pursue this possibility, we have explored 3D-AFM imaging of various 3D-SOSs in interface sciences, life sciences and electrochemistry. Here, we review our recent progress in such 3D-AFM studies on 3D-SOSs, including hydration structures on cellulose nanocrystals, adsorption structures of anti-freezing surfactants on sapphire (0001) surfaces, intra-cellular components inside living cells, and charges accumulated inside an electric double layer. These examples demonstrate the effectiveness of 3D-AFM for understanding the nanoscale structures, properties and functions of various 3D-SOSs.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45678550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Combined FEM and phase field method for reliability design of forward degradation in SiC bipolar device SiC双极器件正向退化可靠性设计的有限元和相场相结合方法
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-06 DOI: 10.35848/1347-4065/acf74c
A. Kano, K. Hirohata, Mitsuaki Kato, C. Ota, Aoi Okada, J. Nishio, Yoji Shibutani
The reliability of 4H-SiC bipolar devices is compromised by the expansion of single Shockley stacking faults (SSFs) during forward-current operation. Because SSF expansion is governed by multiphysical aspects, including electrical, thermal, and stress states, analysis of the mounted structure is important for improving power module design. We propose a practical design method that analyzes the critical condition due to SSF expansion using a combined method with a multiphysical finite element method (FEM) and phase field model based on the time-dependent Ginzburg–Landau equation. In preliminary studies, the thermal deformation of the demonstration module and the variation of threshold current of a bar-shaped SSF were verified from experimental and reference data. Estimating the SSF expansion rate on the constructed response surface under the mutiphysical inputs from FEM, the proposed design method can be used effectively in the design process by changing the various design variables.
4H-SiC双极器件的可靠性受到正向电流操作过程中单个Shockley堆叠故障(SSF)扩展的影响。由于SSF膨胀受多个物理方面的控制,包括电、热和应力状态,因此对安装结构的分析对于改进功率模块设计非常重要。我们提出了一种实用的设计方法,该方法使用多物理有限元法(FEM)和基于含时Ginzburg–Landau方程的相场模型相结合的方法来分析SSF膨胀引起的临界条件。在初步研究中,通过实验和参考数据验证了演示模块的热变形和条形SSF阈值电流的变化。在有限元的多物理输入下,估计构造响应面上的SSF膨胀率,通过改变各种设计变量,可以在设计过程中有效地使用所提出的设计方法。
{"title":"Combined FEM and phase field method for reliability design of forward degradation in SiC bipolar device","authors":"A. Kano, K. Hirohata, Mitsuaki Kato, C. Ota, Aoi Okada, J. Nishio, Yoji Shibutani","doi":"10.35848/1347-4065/acf74c","DOIUrl":"https://doi.org/10.35848/1347-4065/acf74c","url":null,"abstract":"The reliability of 4H-SiC bipolar devices is compromised by the expansion of single Shockley stacking faults (SSFs) during forward-current operation. Because SSF expansion is governed by multiphysical aspects, including electrical, thermal, and stress states, analysis of the mounted structure is important for improving power module design. We propose a practical design method that analyzes the critical condition due to SSF expansion using a combined method with a multiphysical finite element method (FEM) and phase field model based on the time-dependent Ginzburg–Landau equation. In preliminary studies, the thermal deformation of the demonstration module and the variation of threshold current of a bar-shaped SSF were verified from experimental and reference data. Estimating the SSF expansion rate on the constructed response surface under the mutiphysical inputs from FEM, the proposed design method can be used effectively in the design process by changing the various design variables.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45006668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stray light reduction in monolithic GaInN-based μLED arrays for high-definition display realization 用于实现高清晰度显示的单片GaInN基μLED阵列中杂散光的减少
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-04 DOI: 10.35848/1347-4065/acf69d
Tatsunari Saito, Yuta Imaizumi, K. Kobayashi, Yoshinobu Suehiro, N. Koide, T. Takeuchi, S. Kamiyama, M. Iwaya
Monolithic GaInN-based micro μLEDs arrays are expected to be applied to ultra-high-definition displays. In this study, stray light behavior of them fabricated on sapphire substrates was investigated. Results reveal that strong stray light appears considerably outside the μLED drive region, which is a major obstacle to the realization of high-definition displays. We also explored various techniques to effectively reduce the stray light. Use of flat sapphire substrates and removal of GaN material between μLEDs are effective in reducing stray light and are essential for achieving high definition in monolithic GaInN-based μLED array displays.
单片GaInN基微μLED阵列有望应用于超高清显示器。在本研究中,研究了它们在蓝宝石衬底上的杂散光行为。结果表明,μLED驱动区外会出现大量强杂散光,这是实现高清晰度显示器的主要障碍。我们还探索了各种有效减少杂散光的技术。使用平坦蓝宝石衬底和去除μLED之间的GaN材料可以有效地减少杂散光,并且对于在单片GaInN基μLED阵列显示器中实现高清晰度至关重要。
{"title":"Stray light reduction in monolithic GaInN-based μLED arrays for high-definition display realization","authors":"Tatsunari Saito, Yuta Imaizumi, K. Kobayashi, Yoshinobu Suehiro, N. Koide, T. Takeuchi, S. Kamiyama, M. Iwaya","doi":"10.35848/1347-4065/acf69d","DOIUrl":"https://doi.org/10.35848/1347-4065/acf69d","url":null,"abstract":"Monolithic GaInN-based micro μLEDs arrays are expected to be applied to ultra-high-definition displays. In this study, stray light behavior of them fabricated on sapphire substrates was investigated. Results reveal that strong stray light appears considerably outside the μLED drive region, which is a major obstacle to the realization of high-definition displays. We also explored various techniques to effectively reduce the stray light. Use of flat sapphire substrates and removal of GaN material between μLEDs are effective in reducing stray light and are essential for achieving high definition in monolithic GaInN-based μLED array displays.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46330264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
D-shaped microstructure fiber temperature sensor based on surface plasmon resonance 基于表面等离子体共振的D型微结构光纤温度传感器
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-04 DOI: 10.35848/1347-4065/acf69e
Qingmin Liu, S. Hou, Jie Dong, J. Lei, Gang Wu, Zuyong Yan
In order to solve the problems of oxidation of the metal film coated on the outer surface of the photonic crystal fiber and the low sensitivity of the sensor, a side polishing temperature sensor based on surface plasmon resonance is proposed. First, the sensor is modelled with a metal coating on the side of the optical fiber of the sensor, using a temperature sensitive liquid as the temperature sensing substance. Then, simulations were carried out to calculate the structural parameters of the optical fiber and the effect of the metal material on the resonant wavelength of the loss spectrum. By comparing the sensitive sensing of different metal films, gold was chosen as the surface plasma sensing material. Finally, the sensing characteristics of the sensor are simulated using the finite element method. The results show that when gold is used as the surface plasmon material, the wavelength range is 675–1117 nm, and the high sensitivity sensing in the temperature range of 0 °C–60 °C can be realized. When the temperature is 0 °C, the maximum spectral sensitivity is 24.6 nm °C−1. The designed sensors have excellent performance and can be widely used for temperature sensing.
为了解决光子晶体光纤外表面金属膜氧化和传感器灵敏度低的问题,提出了一种基于表面等离子体共振的侧面抛光温度传感器。首先,使用温度敏感液体作为温度感测物质,在传感器的光纤侧上用金属涂层对传感器进行建模。然后,进行了模拟计算,以计算光纤的结构参数以及金属材料对损耗谱共振波长的影响。通过比较不同金属膜的敏感度,选择金作为表面等离子体传感材料。最后,利用有限元方法对传感器的传感特性进行了仿真。结果表明,当金用作表面等离子体材料时,波长范围为675–1117 nm,并且可以实现0°C–60°C温度范围内的高灵敏度传感。当温度为0°C时,最大光谱灵敏度为24.6 nm°C−1。所设计的传感器具有优异的性能,可广泛用于温度传感。
{"title":"D-shaped microstructure fiber temperature sensor based on surface plasmon resonance","authors":"Qingmin Liu, S. Hou, Jie Dong, J. Lei, Gang Wu, Zuyong Yan","doi":"10.35848/1347-4065/acf69e","DOIUrl":"https://doi.org/10.35848/1347-4065/acf69e","url":null,"abstract":"In order to solve the problems of oxidation of the metal film coated on the outer surface of the photonic crystal fiber and the low sensitivity of the sensor, a side polishing temperature sensor based on surface plasmon resonance is proposed. First, the sensor is modelled with a metal coating on the side of the optical fiber of the sensor, using a temperature sensitive liquid as the temperature sensing substance. Then, simulations were carried out to calculate the structural parameters of the optical fiber and the effect of the metal material on the resonant wavelength of the loss spectrum. By comparing the sensitive sensing of different metal films, gold was chosen as the surface plasma sensing material. Finally, the sensing characteristics of the sensor are simulated using the finite element method. The results show that when gold is used as the surface plasmon material, the wavelength range is 675–1117 nm, and the high sensitivity sensing in the temperature range of 0 °C–60 °C can be realized. When the temperature is 0 °C, the maximum spectral sensitivity is 24.6 nm °C−1. The designed sensors have excellent performance and can be widely used for temperature sensing.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47321252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability of piezoelectric films for MEMS MEMS用压电薄膜的可靠性
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-09-01 DOI: 10.35848/1347-4065/acf5f8
S. Trolier-McKinstry, Wanlin Zhu, Betul Akkopru‐Akgun, Fan He, S. Ko, C. Fragkiadakis, Peter Mardilovich
Thin films based on PbZr1−x Ti x O3 and K1−x Na x NbO3 are increasingly being commercialized in piezoelectric MEMS due to the comparatively low drive voltages required relative to bulk actuators, as well as the facile approach to making sensor or actuator arrays. As these materials are incorporated into devices, it is critically important that they operate reliably over the lifetime of the system. This paper discusses some of the factors controlling the electrical and electromechanical reliability of lead zirconate titanate (PZT)-based piezoMEMS films. In particular, it will be shown the gradients in the Zr/Ti ratio through the depth of the films are useful in increasing the lifetime of the films under DC electrical stresses.
基于PbZr1−x Ti x O3和K1−x Na x NbO3的薄膜在压电MEMS中越来越商业化,这是由于相对于体致动器所需的相对较低的驱动电压,以及制造传感器或致动器阵列的简单方法。由于这些材料被结合到设备中,因此它们在系统的整个寿命内可靠运行至关重要。本文讨论了控制锆钛酸铅(PZT)基压电MEMS薄膜电气和机电可靠性的一些因素。特别地,将显示出Zr/Ti比率通过膜的深度的梯度有助于在DC电应力下增加膜的寿命。
{"title":"Reliability of piezoelectric films for MEMS","authors":"S. Trolier-McKinstry, Wanlin Zhu, Betul Akkopru‐Akgun, Fan He, S. Ko, C. Fragkiadakis, Peter Mardilovich","doi":"10.35848/1347-4065/acf5f8","DOIUrl":"https://doi.org/10.35848/1347-4065/acf5f8","url":null,"abstract":"Thin films based on PbZr1−x Ti x O3 and K1−x Na x NbO3 are increasingly being commercialized in piezoelectric MEMS due to the comparatively low drive voltages required relative to bulk actuators, as well as the facile approach to making sensor or actuator arrays. As these materials are incorporated into devices, it is critically important that they operate reliably over the lifetime of the system. This paper discusses some of the factors controlling the electrical and electromechanical reliability of lead zirconate titanate (PZT)-based piezoMEMS films. In particular, it will be shown the gradients in the Zr/Ti ratio through the depth of the films are useful in increasing the lifetime of the films under DC electrical stresses.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":" ","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42956607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation of Si nanoparticles from bamboo leaves and measurement of their photoluminescence and electroluminescence spectra 竹叶硅纳米颗粒的制备及其光致发光和电致发光光谱的测定
IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED Pub Date : 2023-08-31 DOI: 10.35848/1347-4065/acf585
A. Banno, Kimihisa Matsumoto, K. Kamiya, S. Ito
In this study, Si nanoparticles were prepared by the Mg reduction of SiO2 extracted from bamboo leaves, and their optical properties were investigated. Si nanoparticles were filtered under reduced pressure to separate the residue and filtrate specimens. Although room-temperature photoluminescence (PL) was observed for both Si nanoparticle specimens, the PL intensity of the filtrate specimens was approximately seven times higher than that of the residue specimens. An electroluminescence (EL) device was fabricated using the Si nanoparticles of the filtrate as the active layer, and its EL properties were evaluated. With an applied voltage of 15 V, red luminescence was observed in the active layer. The Si nanoparticles from the bamboo leaves had relatively broad EL spectra with a peak wavelength approximately 700 nm, similar to that of the PL spectra. These results indicated that Si nanoparticles from bamboo leaves can be recycled for light-emitting devices.
本研究以竹叶中提取的二氧化硅为原料,通过镁还原制备了硅纳米粒子,并对其光学性能进行了研究。在减压下过滤Si纳米颗粒以分离残留物和滤液样品。尽管对两个Si纳米颗粒样品都观察到室温光致发光(PL),但滤液样品的PL强度大约是残留物样品的7倍。以滤液中的硅纳米粒子为活性层,制备了电致发光器件,并对其电致发光性能进行了评价。在施加15V的电压的情况下,在活性层中观察到红色发光。来自竹叶的Si纳米颗粒具有相对较宽的EL光谱,峰值波长约为700nm,类似于PL光谱。这些结果表明,竹叶中的硅纳米颗粒可以回收用于发光器件。
{"title":"Preparation of Si nanoparticles from bamboo leaves and measurement of their photoluminescence and electroluminescence spectra","authors":"A. Banno, Kimihisa Matsumoto, K. Kamiya, S. Ito","doi":"10.35848/1347-4065/acf585","DOIUrl":"https://doi.org/10.35848/1347-4065/acf585","url":null,"abstract":"\u0000 In this study, Si nanoparticles were prepared by the Mg reduction of SiO2 extracted from bamboo leaves, and their optical properties were investigated. Si nanoparticles were filtered under reduced pressure to separate the residue and filtrate specimens. Although room-temperature photoluminescence (PL) was observed for both Si nanoparticle specimens, the PL intensity of the filtrate specimens was approximately seven times higher than that of the residue specimens. An electroluminescence (EL) device was fabricated using the Si nanoparticles of the filtrate as the active layer, and its EL properties were evaluated. With an applied voltage of 15 V, red luminescence was observed in the active layer. The Si nanoparticles from the bamboo leaves had relatively broad EL spectra with a peak wavelength approximately 700 nm, similar to that of the PL spectra. These results indicated that Si nanoparticles from bamboo leaves can be recycled for light-emitting devices.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":"1 1","pages":""},"PeriodicalIF":1.5,"publicationDate":"2023-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"42974516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Japanese Journal of Applied Physics
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