具有宽检测范围和高分辨率的双量程 Janus 结构压力传感器,兼具三电性和压电性

IF 22.7 1区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Infomat Pub Date : 2024-05-09 DOI:10.1002/inf2.12552
Shilong Zhao, Chaojie Chen, Zhiyuan Wang, Caofeng Pan, Cheng Yang
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引用次数: 0

摘要

使压力传感器具有高分辨率和宽检测范围是至关重要的,但由于每种已知传感方法的局限性,使其具有挑战性。将不同的传感机制叠加在一起以实现互补功能是一种很有前景的方法,但这往往会导致设备厚度增加、信号串扰和复杂的信号通道管理。在这里,我们提出了一种采用 Janus 薄膜布局的双功能保形压力传感器,只需一对电极就能同时实现压电和三电信号检测功能,展现了最紧凑的器件配置。值得注意的是,尽管其厚度很薄(封装器件约为 80 μm),但却具有宽范围检测能力、高信号分辨率和快速响应时间,显示出与压电和三电相对应的明显信号中继特性。尽管该器件外形纤薄、结构简单,但在 0.1-140 kPa 和 140-380 kPa 范围内的信号分辨率分别为 0.93 V-kPa-1 和 0.05 V-kPa-1,令人印象深刻。此外,该装置的制造还可与叽里咕噜法相结合,以提高与接合面的贴合度。这项工作为设计先进的压力传感机制引入了一种创新范式,通过其简洁、纤薄的布局、可适配和自供电的特性,使单一装置就能满足多种应用场景。
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A dual-range Janus-structure pressure sensor with broad detection range and high resolution combining triboelectricity and piezoelectricity
Enabling pressure sensors with high resolution and a broad detection range is of paramount importance yet challenging due to the limitations of each known sensing method. Overlying different sensing mechanisms to achieve complementary functions is a promising approach, but it often leads to increased device thickness, crosstalk signals and complex signal channel management. Herein, we present a dual-functional conformable pressure sensor that adopts a Janus thin film layout, enabling simultaneous piezoelectric and triboelectric signal detection capabilities between just one electrode pair, showing a most compact device configuration. Notably, despite its thin thickness (~80 μm for a packaged device), it exhibits a broad-range detection capability with high signal resolution and fast response time, demonstrating a distinct signal-relay characteristic corresponding to piezoelectricity and triboelectricity. Despite the slimness and simple structure, it shows an impressive signal resolution of 0.93 V·kPa−1 in the range of 0.1–140 kPa and 0.05 V·kPa−1 in the range of 140–380 kPa. Moreover, the device fabrication can be combined with the kirigami method to improve fitting to joint surfaces. This work introduces an innovative paradigm for designing advanced pressure sensing mechanisms, enabling a single device that can meet diverse application scenarios through its simplicity, slim layout, conformable, and self-powered characteristics to adapt to multiple scenarios.
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来源期刊
Infomat
Infomat MATERIALS SCIENCE, MULTIDISCIPLINARY-
CiteScore
37.70
自引率
3.10%
发文量
111
审稿时长
8 weeks
期刊介绍: InfoMat, an interdisciplinary and open-access journal, caters to the growing scientific interest in novel materials with unique electrical, optical, and magnetic properties, focusing on their applications in the rapid advancement of information technology. The journal serves as a high-quality platform for researchers across diverse scientific areas to share their findings, critical opinions, and foster collaboration between the materials science and information technology communities.
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