具有高灵敏度、宽带宽和低噪音密度的聚合物压电加速度计,适用于有机电子产品和可穿戴微型系统。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-05-15 eCollection Date: 2024-01-01 DOI:10.1038/s41378-024-00704-6
Chang Ge, Edmond Cretu
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引用次数: 0

摘要

压电加速度计在振动传感方面表现出色。在全有机电子微系统的新兴趋势中,聚合物压电加速度计可用作捕捉动态信号的重要前端元件,例如为有说话困难的人设计的可穿戴说话助手中的声音振动。然而,适合此类应用的高性能聚合物压电加速度计并不多见。PVDF 等压电有机化合物的性能不如 PZT 等无机化合物。因此,现有的大多数聚合物压电加速度计的性能指标都很不平衡。为了获得与基于 PZT 的加速度计相当的平带灵敏度,它们往往牺牲了共振频率和带宽,导致噪声密度增加,应用潜力有限。本研究介绍了一种新型聚合物压电加速度计设计,以克服 PVDF 材料的局限性。这种新设计旨在同时实现高灵敏度、宽带宽和低噪音。制造并鉴定了五个样品,结果表明,在 ± 10 g 输入范围内,平均灵敏度为 29.45 pC/g,5% 平带为 160 Hz,带内噪声密度为 1.4 µg/Hz。这些结果超过了许多基于 PZT 的压电加速度计,显示了在聚合物压电加速度计中实现全面高性能的可行性,从而提高了它们在有机微系统等新型应用中的潜力。
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Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems.

Piezoelectric accelerometers excel in vibration sensing. In the emerging trend of fully organic electronic microsystems, polymeric piezoelectric accelerometers can be used as vital front-end components to capture dynamic signals, such as vocal vibrations in wearable speaking assistants for those with speaking difficulties. However, high-performance polymeric piezoelectric accelerometers suitable for such applications are rare. Piezoelectric organic compounds such as PVDF have inferior properties to their inorganic counterparts such as PZT. Consequently, most existing polymeric piezoelectric accelerometers have very unbalanced performance metrics. They often sacrifice resonance frequency and bandwidth for a flat-band sensitivity comparable to those of PZT-based accelerometers, leading to increased noise density and limited application potentials. In this study, a new polymeric piezoelectric accelerometer design to overcome the material limitations of PVDF is introduced. This new design aims to simultaneously achieve high sensitivity, broad bandwidth, and low noise. Five samples were manufactured and characterized, demonstrating an average sensitivity of 29.45 pC/g within a ± 10 g input range, a 5% flat band of 160 Hz, and an in-band noise density of 1.4 µg/Hz. These results surpass those of many PZT-based piezoelectric accelerometers, showing the feasibility of achieving comprehensively high performance in polymeric piezoelectric accelerometers to increase their potential in novel applications such as organic microsystems.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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