用于全印刷智能传感器贴片的基于氧化物半导体的深亚阈值操作读出电子器件

Exploration Pub Date : 2024-05-15 DOI:10.1002/exp.20230167
J. R. Pradhan, Sushree Sangita Priyadarsini, Sanjana R. Nibgoor, Manvendra Singh, S. Dasgupta
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引用次数: 0

摘要

利用商业印刷技术制造带有读出电子元件的整个智能传感器贴片可能具有广泛的潜在应用。虽然溶液加工的氧化物薄膜晶体管(TFT)能够提供高迁移率电子传输,从而产生较大的导通电流和功率输出,但几乎没有文献报道在传感器接口处使用印刷氧化物 TFT。本文报告了基于非晶铟镓锌氧化物(a-IGZO)的印刷型深亚阈值工作 TFT,它包含信号放大器和模数转换器(ADC),能成功地将频率范围高达 1 kHz 的模拟传感器信号数字化。此外,利用大电流氧化物 TFT,在模数转换器单元之后放置一个电流驱动电路,可在预定的阈值交叉点上对传感器信号进行易于检测的视觉识别。值得注意的是,整个智能传感器贴片可在≤2 V 的低电源电压下工作,从而确保其成为兼容片上能源的独立检测单元。
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Oxide semiconductor based deep‐subthreshold operated read‐out electronics for all‐printed smart sensor patches
The ability to fabricate an entire smart sensor patch with read‐out electronics using commercial printing techniques may have a wide range of potential applications. Although solution‐processed oxide thin film transistors (TFTs) are capable of providing high mobility electron transport, resulting in large ON‐state current and power output, there is hardly any literature report that uses the printed oxide TFTs at the sensor interfaces. Here, printed amorphous indium‐gallium‐zinc oxide (a‐IGZO)‐based deep‐subthreshold operated TFTs that comprise signal amplifiers and analog‐to‐digital converters (ADCs) that can successfully digitalize the analog sensor signals up to a frequency range of 1 kHz are reported. In addition, exploiting the high current oxide TFTs, a current drive circuit placed after the ADC unit has been found useful in producing easy‐to‐detect visual recognition of the sensor signal at a predefined threshold crossover. Notably, the entire smart sensor patch is demonstrated to operate at a low supply voltage of ≤2 V, thereby ensuring that it can be an on‐chip energy source compatible and standalone detection unit.
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