{"title":"利用磁控溅射和电容耦合尘埃等离子体合成具有液态核心的核壳纳米粒子","authors":"Munaswamy Murugesh, Koichi Sasaki","doi":"10.35848/1347-4065/ad483d","DOIUrl":null,"url":null,"abstract":"\n We succeeded in depositing amorphous carbon films around tin nanodroplets retained in a capacitively coupled plasma (CCP). High-pressure magnetron sputtering was used for synthesizing tin nanoparticles at the top of a vacuum chamber. Tin nanoparticles were transported to CCP at the bottom of the chamber, and they were trapped in the sheath above an rf electrode. Tin nanoparticles were heated above the melting point by ion bombardment in CCP. We introduced methane into CCP to deposit amorphous carbon films around melted tin nanoparticles. The transmission electron microscope (TEM) images of core-shell nanoparticles showed completely spherical cores. We observed the melting of cores at the melting point of metal tin when we heated core-shell nanoparticles in TEM, suggesting that the amorphous carbon films protected cores from the oxidation. In addition, the amorphous carbon films were robust against the volume expansion of the cores due to melting.","PeriodicalId":505044,"journal":{"name":"Japanese Journal of Applied Physics","volume":"26 14","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Synthesis of core-shell nanoparticles with liquid core using magnetron sputtering and capacitively coupled dusty plasmas\",\"authors\":\"Munaswamy Murugesh, Koichi Sasaki\",\"doi\":\"10.35848/1347-4065/ad483d\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n We succeeded in depositing amorphous carbon films around tin nanodroplets retained in a capacitively coupled plasma (CCP). High-pressure magnetron sputtering was used for synthesizing tin nanoparticles at the top of a vacuum chamber. Tin nanoparticles were transported to CCP at the bottom of the chamber, and they were trapped in the sheath above an rf electrode. Tin nanoparticles were heated above the melting point by ion bombardment in CCP. We introduced methane into CCP to deposit amorphous carbon films around melted tin nanoparticles. The transmission electron microscope (TEM) images of core-shell nanoparticles showed completely spherical cores. We observed the melting of cores at the melting point of metal tin when we heated core-shell nanoparticles in TEM, suggesting that the amorphous carbon films protected cores from the oxidation. In addition, the amorphous carbon films were robust against the volume expansion of the cores due to melting.\",\"PeriodicalId\":505044,\"journal\":{\"name\":\"Japanese Journal of Applied Physics\",\"volume\":\"26 14\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Japanese Journal of Applied Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.35848/1347-4065/ad483d\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad483d","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
我们成功地在电容耦合等离子体(CCP)中保留的锡纳米液滴周围沉积了无定形碳薄膜。高压磁控溅射用于在真空室顶部合成纳米锡粒子。纳米锡颗粒被输送到真空室底部的电容耦合等离子体中,并被截留在射频电极上方的护套中。在 CCP 中,通过离子轰击将纳米锡粒子加热到熔点以上。我们将甲烷引入 CCP,在熔化的纳米锡粒子周围沉积无定形碳薄膜。核壳纳米粒子的透射电子显微镜(TEM)图像显示出完全球形的核。在 TEM 中加热核壳纳米粒子时,我们观察到核在金属锡的熔点处熔化,这表明无定形碳薄膜保护了核免受氧化。此外,无定形碳薄膜还能防止芯核因熔化而导致的体积膨胀。
Synthesis of core-shell nanoparticles with liquid core using magnetron sputtering and capacitively coupled dusty plasmas
We succeeded in depositing amorphous carbon films around tin nanodroplets retained in a capacitively coupled plasma (CCP). High-pressure magnetron sputtering was used for synthesizing tin nanoparticles at the top of a vacuum chamber. Tin nanoparticles were transported to CCP at the bottom of the chamber, and they were trapped in the sheath above an rf electrode. Tin nanoparticles were heated above the melting point by ion bombardment in CCP. We introduced methane into CCP to deposit amorphous carbon films around melted tin nanoparticles. The transmission electron microscope (TEM) images of core-shell nanoparticles showed completely spherical cores. We observed the melting of cores at the melting point of metal tin when we heated core-shell nanoparticles in TEM, suggesting that the amorphous carbon films protected cores from the oxidation. In addition, the amorphous carbon films were robust against the volume expansion of the cores due to melting.