Thermomechanical Responses and Energy Conversion Efficiency of a Hybrid Thermoelectric–Piezoelectric Layered Structure

This paper develops a thermoelectric (TE)–piezoelectric (PE) hybrid structure with the PE layer acting as both a support membrane and a sensor for the TE film for microelectronics applications. The TE and PE layers are assumed to be perfectly bonded mechanically and thermally but electrically shielded and insulated with each other. The thermo-electro-mechanical responses of the hybrid bilayer under the TE generator operation conditions are obtained, and the influence of the PE layer on the TE energy conversion efficiency is investigated. The numerical results for a Bi2Te3/PZT-5H bilayer structure show that large compressive stresses develop in both the PE and TE layers. With a decrease in the PE layer thickness, the magnitude of the maximum compressive stress in the PE layer increases whereas the maximum magnitude of the stress in the TE layer decreases. The numerical result of the TE energy conversion efficiency shows that increasing the PE layer thickness leads to lower energy conversion efficiencies. A nearly 40% reduction in the peak efficiency is observed with a PE layer of the same thickness as that of the TE layer. These results suggest that design of TE films with supporting/sensing membranes must consider both aspects of energy conversion efficiency and the thermomechanical reliability of both the TE and PE layers.